JPS52149968A - Heat treatment method of semiconductor wafers - Google Patents
Heat treatment method of semiconductor wafersInfo
- Publication number
- JPS52149968A JPS52149968A JP6655476A JP6655476A JPS52149968A JP S52149968 A JPS52149968 A JP S52149968A JP 6655476 A JP6655476 A JP 6655476A JP 6655476 A JP6655476 A JP 6655476A JP S52149968 A JPS52149968 A JP S52149968A
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment method
- semiconductor wafers
- wafers
- contamination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the contamination of wafers by using a container made of Si for directly accommodating a wafer jig and heat treating the wafers.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6655476A JPS52149968A (en) | 1976-06-09 | 1976-06-09 | Heat treatment method of semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6655476A JPS52149968A (en) | 1976-06-09 | 1976-06-09 | Heat treatment method of semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52149968A true JPS52149968A (en) | 1977-12-13 |
Family
ID=13319240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6655476A Pending JPS52149968A (en) | 1976-06-09 | 1976-06-09 | Heat treatment method of semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52149968A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57162326A (en) * | 1981-03-30 | 1982-10-06 | Fujitsu Ltd | Vapor phase growing device |
-
1976
- 1976-06-09 JP JP6655476A patent/JPS52149968A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57162326A (en) * | 1981-03-30 | 1982-10-06 | Fujitsu Ltd | Vapor phase growing device |
JPS6226171B2 (en) * | 1981-03-30 | 1987-06-08 | Fujitsu Ltd |
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