JPS52149968A - Heat treatment method of semiconductor wafers - Google Patents

Heat treatment method of semiconductor wafers

Info

Publication number
JPS52149968A
JPS52149968A JP6655476A JP6655476A JPS52149968A JP S52149968 A JPS52149968 A JP S52149968A JP 6655476 A JP6655476 A JP 6655476A JP 6655476 A JP6655476 A JP 6655476A JP S52149968 A JPS52149968 A JP S52149968A
Authority
JP
Japan
Prior art keywords
heat treatment
treatment method
semiconductor wafers
wafers
contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6655476A
Other languages
Japanese (ja)
Inventor
Noboru Tatefuru
Keizo Inaba
Shuichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6655476A priority Critical patent/JPS52149968A/en
Publication of JPS52149968A publication Critical patent/JPS52149968A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the contamination of wafers by using a container made of Si for directly accommodating a wafer jig and heat treating the wafers.
COPYRIGHT: (C)1977,JPO&Japio
JP6655476A 1976-06-09 1976-06-09 Heat treatment method of semiconductor wafers Pending JPS52149968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6655476A JPS52149968A (en) 1976-06-09 1976-06-09 Heat treatment method of semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6655476A JPS52149968A (en) 1976-06-09 1976-06-09 Heat treatment method of semiconductor wafers

Publications (1)

Publication Number Publication Date
JPS52149968A true JPS52149968A (en) 1977-12-13

Family

ID=13319240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6655476A Pending JPS52149968A (en) 1976-06-09 1976-06-09 Heat treatment method of semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS52149968A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57162326A (en) * 1981-03-30 1982-10-06 Fujitsu Ltd Vapor phase growing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57162326A (en) * 1981-03-30 1982-10-06 Fujitsu Ltd Vapor phase growing device
JPS6226171B2 (en) * 1981-03-30 1987-06-08 Fujitsu Ltd

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