JPS5377178A - Chuking device of semiconductor element substrate - Google Patents
Chuking device of semiconductor element substrateInfo
- Publication number
- JPS5377178A JPS5377178A JP15325876A JP15325876A JPS5377178A JP S5377178 A JPS5377178 A JP S5377178A JP 15325876 A JP15325876 A JP 15325876A JP 15325876 A JP15325876 A JP 15325876A JP S5377178 A JPS5377178 A JP S5377178A
- Authority
- JP
- Japan
- Prior art keywords
- chuking
- semiconductor element
- element substrate
- chucking
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding Of Workpieces (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Abstract
PURPOSE: To make possible chucking in a vacuum by the oscillating and vertical motions in the radiation direction of a wafer of 3 or more notched chucking jaws encircling the outside circumference of the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15325876A JPS5377178A (en) | 1976-12-20 | 1976-12-20 | Chuking device of semiconductor element substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15325876A JPS5377178A (en) | 1976-12-20 | 1976-12-20 | Chuking device of semiconductor element substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5377178A true JPS5377178A (en) | 1978-07-08 |
JPS5343021B2 JPS5343021B2 (en) | 1978-11-16 |
Family
ID=15558512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15325876A Granted JPS5377178A (en) | 1976-12-20 | 1976-12-20 | Chuking device of semiconductor element substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5377178A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60142068U (en) * | 1984-02-27 | 1985-09-20 | 住倉工業株式会社 | Chucking mechanism in cutlet spring tightening machine |
JPS6489530A (en) * | 1987-09-30 | 1989-04-04 | Toshiba Corp | Automatic setting device for semiconductor wafer |
-
1976
- 1976-12-20 JP JP15325876A patent/JPS5377178A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60142068U (en) * | 1984-02-27 | 1985-09-20 | 住倉工業株式会社 | Chucking mechanism in cutlet spring tightening machine |
JPS6489530A (en) * | 1987-09-30 | 1989-04-04 | Toshiba Corp | Automatic setting device for semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JPS5343021B2 (en) | 1978-11-16 |
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