JPS54149470A - Washing jig of semiconductor chip - Google Patents
Washing jig of semiconductor chipInfo
- Publication number
- JPS54149470A JPS54149470A JP5837678A JP5837678A JPS54149470A JP S54149470 A JPS54149470 A JP S54149470A JP 5837678 A JP5837678 A JP 5837678A JP 5837678 A JP5837678 A JP 5837678A JP S54149470 A JPS54149470 A JP S54149470A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- face
- washing
- jig
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To obtain a washing jig of semiconductor chips having no fear of injuries at a washing time by preventing the pattern face, which is formed on the surface of chips, from being brought into contact with the jig.
CONSTITUTION: Upper cover 21 and washing jig main body 22 are provided. Washing jig main body 22 has partitions 24 so that chips 23 can be separated one by one and stored. The bottom face of chip storage rooms 25 formed by partitions 24 is formed into a curved face. Consequently, the chip stored in each storage room 25 is supported by two sides corresponding to this surverd face, and a gap is generated between the pattern face and the jig bottom face. Through hole 26 is provided in the bottom face of each chip storage room and the upper cover previously, and washing liquid for the chip passes through this hole. At a chip washing time, the chip is put on the curved face of the chip storage room so that the pattern- formed face of the chip may be faceup. As a result, the pattern-formed face of the chip is supported at the edge by the curved bottom face of the washing jig, and can be prevented from being brought into contact with the washing jig directly.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5837678A JPS54149470A (en) | 1978-05-16 | 1978-05-16 | Washing jig of semiconductor chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5837678A JPS54149470A (en) | 1978-05-16 | 1978-05-16 | Washing jig of semiconductor chip |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54149470A true JPS54149470A (en) | 1979-11-22 |
JPS6114656B2 JPS6114656B2 (en) | 1986-04-19 |
Family
ID=13082599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5837678A Granted JPS54149470A (en) | 1978-05-16 | 1978-05-16 | Washing jig of semiconductor chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54149470A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6163836U (en) * | 1984-10-02 | 1986-04-30 | ||
JPS61204941A (en) * | 1985-03-08 | 1986-09-11 | Hitachi Ltd | Conveying tray for washing apparatus |
-
1978
- 1978-05-16 JP JP5837678A patent/JPS54149470A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6163836U (en) * | 1984-10-02 | 1986-04-30 | ||
JPS61204941A (en) * | 1985-03-08 | 1986-09-11 | Hitachi Ltd | Conveying tray for washing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6114656B2 (en) | 1986-04-19 |
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