JPS54149470A - Washing jig of semiconductor chip - Google Patents

Washing jig of semiconductor chip

Info

Publication number
JPS54149470A
JPS54149470A JP5837678A JP5837678A JPS54149470A JP S54149470 A JPS54149470 A JP S54149470A JP 5837678 A JP5837678 A JP 5837678A JP 5837678 A JP5837678 A JP 5837678A JP S54149470 A JPS54149470 A JP S54149470A
Authority
JP
Japan
Prior art keywords
chip
face
washing
jig
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5837678A
Other languages
Japanese (ja)
Other versions
JPS6114656B2 (en
Inventor
Terunobu Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5837678A priority Critical patent/JPS54149470A/en
Publication of JPS54149470A publication Critical patent/JPS54149470A/en
Publication of JPS6114656B2 publication Critical patent/JPS6114656B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To obtain a washing jig of semiconductor chips having no fear of injuries at a washing time by preventing the pattern face, which is formed on the surface of chips, from being brought into contact with the jig.
CONSTITUTION: Upper cover 21 and washing jig main body 22 are provided. Washing jig main body 22 has partitions 24 so that chips 23 can be separated one by one and stored. The bottom face of chip storage rooms 25 formed by partitions 24 is formed into a curved face. Consequently, the chip stored in each storage room 25 is supported by two sides corresponding to this surverd face, and a gap is generated between the pattern face and the jig bottom face. Through hole 26 is provided in the bottom face of each chip storage room and the upper cover previously, and washing liquid for the chip passes through this hole. At a chip washing time, the chip is put on the curved face of the chip storage room so that the pattern- formed face of the chip may be faceup. As a result, the pattern-formed face of the chip is supported at the edge by the curved bottom face of the washing jig, and can be prevented from being brought into contact with the washing jig directly.
COPYRIGHT: (C)1979,JPO&Japio
JP5837678A 1978-05-16 1978-05-16 Washing jig of semiconductor chip Granted JPS54149470A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5837678A JPS54149470A (en) 1978-05-16 1978-05-16 Washing jig of semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5837678A JPS54149470A (en) 1978-05-16 1978-05-16 Washing jig of semiconductor chip

Publications (2)

Publication Number Publication Date
JPS54149470A true JPS54149470A (en) 1979-11-22
JPS6114656B2 JPS6114656B2 (en) 1986-04-19

Family

ID=13082599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5837678A Granted JPS54149470A (en) 1978-05-16 1978-05-16 Washing jig of semiconductor chip

Country Status (1)

Country Link
JP (1) JPS54149470A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163836U (en) * 1984-10-02 1986-04-30
JPS61204941A (en) * 1985-03-08 1986-09-11 Hitachi Ltd Conveying tray for washing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163836U (en) * 1984-10-02 1986-04-30
JPS61204941A (en) * 1985-03-08 1986-09-11 Hitachi Ltd Conveying tray for washing apparatus

Also Published As

Publication number Publication date
JPS6114656B2 (en) 1986-04-19

Similar Documents

Publication Publication Date Title
JPS52124865A (en) Semiconductor device
JPS528785A (en) Semiconductor device electrode structure
JPS5356972A (en) Mesa type semiconductor device
JPS54149470A (en) Washing jig of semiconductor chip
JPS5326689A (en) Semiconductor integrated circuit unit
JPS54134553A (en) Wafer holding tool
JPS5290268A (en) Semiconductor device
JPS5210032A (en) Construction method of semiconductor memory unit
JPS52155968A (en) Semiconductor wafer and its production
JPS54105987A (en) Manufacture of semiconductor device
JPS5367381A (en) Semiconductor device
JPS52117066A (en) Semiconductor device
JPS5353254A (en) Semiconductor device
JPS52119875A (en) Formation of isolation area
JPS5267275A (en) Semiconductor unit
JPS51118384A (en) Manufacturing prouss for mos type semiconductor unit
JPS52134375A (en) Semiconductor package
JPS5375865A (en) Plate form object containing case
JPS51132785A (en) Semiconductor integrated circuit
JPS5315049A (en) Monostable multivibrator circuit
JPS51113580A (en) Memory unit of large-scale semi- conductor integrated circuit
JPS5323565A (en) Production of bump semiconductor device
JPS5240974A (en) Package for semiconductor chips
JPS5287373A (en) Production of semiconductor device
JPS52153386A (en) Preparation of planer type semiconductor device