JPS5375865A - Plate form object containing case - Google Patents

Plate form object containing case

Info

Publication number
JPS5375865A
JPS5375865A JP15092376A JP15092376A JPS5375865A JP S5375865 A JPS5375865 A JP S5375865A JP 15092376 A JP15092376 A JP 15092376A JP 15092376 A JP15092376 A JP 15092376A JP S5375865 A JPS5375865 A JP S5375865A
Authority
JP
Japan
Prior art keywords
plate form
object containing
containing case
form object
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15092376A
Other languages
Japanese (ja)
Inventor
Yoshio Ikura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15092376A priority Critical patent/JPS5375865A/en
Publication of JPS5375865A publication Critical patent/JPS5375865A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate the insertion of pincettes and eliminate damaging of wafers at their withdrawing by tilting the bottom of the wafer containing holes provided in a case, letting the upper part of the sloped faceof the bottom reach the top of the case and providing depressions deeper than the bottom in the regions including one edge portion of the upper part of the sloped face.
COPYRIGHT: (C)1978,JPO&Japio
JP15092376A 1976-12-17 1976-12-17 Plate form object containing case Pending JPS5375865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15092376A JPS5375865A (en) 1976-12-17 1976-12-17 Plate form object containing case

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15092376A JPS5375865A (en) 1976-12-17 1976-12-17 Plate form object containing case

Publications (1)

Publication Number Publication Date
JPS5375865A true JPS5375865A (en) 1978-07-05

Family

ID=15507351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15092376A Pending JPS5375865A (en) 1976-12-17 1976-12-17 Plate form object containing case

Country Status (1)

Country Link
JP (1) JPS5375865A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62131441U (en) * 1986-02-13 1987-08-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62131441U (en) * 1986-02-13 1987-08-19

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