JPS52117550A - Electrode formation method - Google Patents
Electrode formation methodInfo
- Publication number
- JPS52117550A JPS52117550A JP3491976A JP3491976A JPS52117550A JP S52117550 A JPS52117550 A JP S52117550A JP 3491976 A JP3491976 A JP 3491976A JP 3491976 A JP3491976 A JP 3491976A JP S52117550 A JPS52117550 A JP S52117550A
- Authority
- JP
- Japan
- Prior art keywords
- formation method
- electrode formation
- electrode
- electrode film
- sensitive resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To form both lower and upper electrode film on the entire surface by coating sensitive resin onto the electrode non-formation area of semiconductor substrate and then to select and remove the lower electrode film by removing the electrode film and sensitive resin at the non-formation area. Thus, multi-player electrode of micro-pattern can be obtained.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3491976A JPS6019661B2 (en) | 1976-03-30 | 1976-03-30 | Electrode formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3491976A JPS6019661B2 (en) | 1976-03-30 | 1976-03-30 | Electrode formation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52117550A true JPS52117550A (en) | 1977-10-03 |
JPS6019661B2 JPS6019661B2 (en) | 1985-05-17 |
Family
ID=12427614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3491976A Expired JPS6019661B2 (en) | 1976-03-30 | 1976-03-30 | Electrode formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6019661B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125627A (en) * | 1979-03-22 | 1980-09-27 | Hitachi Ltd | Formation of electrode for semiconductor device |
JPS574156A (en) * | 1980-06-10 | 1982-01-09 | Nec Corp | Semiconductor device |
-
1976
- 1976-03-30 JP JP3491976A patent/JPS6019661B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55125627A (en) * | 1979-03-22 | 1980-09-27 | Hitachi Ltd | Formation of electrode for semiconductor device |
JPS574156A (en) * | 1980-06-10 | 1982-01-09 | Nec Corp | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6019661B2 (en) | 1985-05-17 |
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