JPS5258480A - Wafer pick-up device - Google Patents

Wafer pick-up device

Info

Publication number
JPS5258480A
JPS5258480A JP13408575A JP13408575A JPS5258480A JP S5258480 A JPS5258480 A JP S5258480A JP 13408575 A JP13408575 A JP 13408575A JP 13408575 A JP13408575 A JP 13408575A JP S5258480 A JPS5258480 A JP S5258480A
Authority
JP
Japan
Prior art keywords
pick
multiplicity
wafer pick
wafers
opposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13408575A
Other languages
Japanese (ja)
Inventor
Masaru Tsukahara
Hitoshi Horimuki
Takao Ishihara
Kazuhiko Watanabe
Masaru Takaishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13408575A priority Critical patent/JPS5258480A/en
Publication of JPS5258480A publication Critical patent/JPS5258480A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make possible the simultaneous pick-up of a multiplicity of wafers by disposing a pick-up device having plural pick-up recesses built-in with a multiplicity of vacuum suction holes over a a multiplicity of the wafers placed in predetermined positions in opposition thereto.
COPYRIGHT: (C)1977,JPO&Japio
JP13408575A 1975-11-10 1975-11-10 Wafer pick-up device Pending JPS5258480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13408575A JPS5258480A (en) 1975-11-10 1975-11-10 Wafer pick-up device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13408575A JPS5258480A (en) 1975-11-10 1975-11-10 Wafer pick-up device

Publications (1)

Publication Number Publication Date
JPS5258480A true JPS5258480A (en) 1977-05-13

Family

ID=15120048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13408575A Pending JPS5258480A (en) 1975-11-10 1975-11-10 Wafer pick-up device

Country Status (1)

Country Link
JP (1) JPS5258480A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512663U (en) * 1978-07-10 1980-01-26
US4981315A (en) * 1987-12-22 1991-01-01 Recif, S.A. Tip for a vacuum pipette
US6631935B1 (en) * 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512663U (en) * 1978-07-10 1980-01-26
JPS5727151Y2 (en) * 1978-07-10 1982-06-14
US4981315A (en) * 1987-12-22 1991-01-01 Recif, S.A. Tip for a vacuum pipette
US6631935B1 (en) * 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects
US6688662B2 (en) 2000-08-04 2004-02-10 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafers and wafer-like objects
US7104579B2 (en) 2000-08-04 2006-09-12 Tru-Si Technologies Inc. Detection and handling of semiconductor wafers and wafer-like objects
US7144056B2 (en) 2000-08-04 2006-12-05 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafers and wafers-like objects

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