JPS5258480A - Wafer pick-up device - Google Patents
Wafer pick-up deviceInfo
- Publication number
- JPS5258480A JPS5258480A JP13408575A JP13408575A JPS5258480A JP S5258480 A JPS5258480 A JP S5258480A JP 13408575 A JP13408575 A JP 13408575A JP 13408575 A JP13408575 A JP 13408575A JP S5258480 A JPS5258480 A JP S5258480A
- Authority
- JP
- Japan
- Prior art keywords
- pick
- multiplicity
- wafer pick
- wafers
- opposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make possible the simultaneous pick-up of a multiplicity of wafers by disposing a pick-up device having plural pick-up recesses built-in with a multiplicity of vacuum suction holes over a a multiplicity of the wafers placed in predetermined positions in opposition thereto.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13408575A JPS5258480A (en) | 1975-11-10 | 1975-11-10 | Wafer pick-up device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13408575A JPS5258480A (en) | 1975-11-10 | 1975-11-10 | Wafer pick-up device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5258480A true JPS5258480A (en) | 1977-05-13 |
Family
ID=15120048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13408575A Pending JPS5258480A (en) | 1975-11-10 | 1975-11-10 | Wafer pick-up device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258480A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5512663U (en) * | 1978-07-10 | 1980-01-26 | ||
US4981315A (en) * | 1987-12-22 | 1991-01-01 | Recif, S.A. | Tip for a vacuum pipette |
US6631935B1 (en) * | 2000-08-04 | 2003-10-14 | Tru-Si Technologies, Inc. | Detection and handling of semiconductor wafer and wafer-like objects |
-
1975
- 1975-11-10 JP JP13408575A patent/JPS5258480A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5512663U (en) * | 1978-07-10 | 1980-01-26 | ||
JPS5727151Y2 (en) * | 1978-07-10 | 1982-06-14 | ||
US4981315A (en) * | 1987-12-22 | 1991-01-01 | Recif, S.A. | Tip for a vacuum pipette |
US6631935B1 (en) * | 2000-08-04 | 2003-10-14 | Tru-Si Technologies, Inc. | Detection and handling of semiconductor wafer and wafer-like objects |
US6688662B2 (en) | 2000-08-04 | 2004-02-10 | Tru-Si Technologies, Inc. | Detection and handling of semiconductor wafers and wafer-like objects |
US7104579B2 (en) | 2000-08-04 | 2006-09-12 | Tru-Si Technologies Inc. | Detection and handling of semiconductor wafers and wafer-like objects |
US7144056B2 (en) | 2000-08-04 | 2006-12-05 | Tru-Si Technologies, Inc. | Detection and handling of semiconductor wafers and wafers-like objects |
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