JPS5224463A - Method for thermal diffusion for semiconductor - Google Patents

Method for thermal diffusion for semiconductor

Info

Publication number
JPS5224463A
JPS5224463A JP10086375A JP10086375A JPS5224463A JP S5224463 A JPS5224463 A JP S5224463A JP 10086375 A JP10086375 A JP 10086375A JP 10086375 A JP10086375 A JP 10086375A JP S5224463 A JPS5224463 A JP S5224463A
Authority
JP
Japan
Prior art keywords
thermal diffusion
semiconductor
mass production
base plates
continuous movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10086375A
Other languages
Japanese (ja)
Inventor
Masao Yamawaki
Katsuo Aoki
Osamu Ina
Takao Suzuki
Yoshio Oka
Kunihiko Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP10086375A priority Critical patent/JPS5224463A/en
Priority to US05/714,806 priority patent/US4075972A/en
Publication of JPS5224463A publication Critical patent/JPS5224463A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To conduct thermal diffusion by means of continuous movement of boats loaded with base plates, thus enabling mass production and reducing characteristic scatter.
COPYRIGHT: (C)1977,JPO&Japio
JP10086375A 1975-08-20 1975-08-20 Method for thermal diffusion for semiconductor Pending JPS5224463A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10086375A JPS5224463A (en) 1975-08-20 1975-08-20 Method for thermal diffusion for semiconductor
US05/714,806 US4075972A (en) 1975-08-20 1976-08-16 Apparatus for thermal diffusion of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10086375A JPS5224463A (en) 1975-08-20 1975-08-20 Method for thermal diffusion for semiconductor

Publications (1)

Publication Number Publication Date
JPS5224463A true JPS5224463A (en) 1977-02-23

Family

ID=14285138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10086375A Pending JPS5224463A (en) 1975-08-20 1975-08-20 Method for thermal diffusion for semiconductor

Country Status (1)

Country Link
JP (1) JPS5224463A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120000490A (en) * 2010-06-25 2012-01-02 고요 써모시스템 주식회사 Continuous diffusion apparatus
JP2012009641A (en) * 2010-06-25 2012-01-12 Koyo Thermo System Kk Continuous diffusion processing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120000490A (en) * 2010-06-25 2012-01-02 고요 써모시스템 주식회사 Continuous diffusion apparatus
JP2012009641A (en) * 2010-06-25 2012-01-12 Koyo Thermo System Kk Continuous diffusion processing apparatus
JP2012009638A (en) * 2010-06-25 2012-01-12 Koyo Thermo System Kk Continuous diffusion processing apparatus

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