JPS5318954A - Diffusing process of impurity - Google Patents
Diffusing process of impurityInfo
- Publication number
- JPS5318954A JPS5318954A JP9386876A JP9386876A JPS5318954A JP S5318954 A JPS5318954 A JP S5318954A JP 9386876 A JP9386876 A JP 9386876A JP 9386876 A JP9386876 A JP 9386876A JP S5318954 A JPS5318954 A JP S5318954A
- Authority
- JP
- Japan
- Prior art keywords
- impurity
- diffusing process
- substrate
- diffusing
- peripheries
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain excellent uniformity of the distribution of the diffusion layer resistance in a substrate, by positioning the whole periphery of the substrate within the peripheries of the adjacent diffusion sources.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9386876A JPS5318954A (en) | 1976-08-05 | 1976-08-05 | Diffusing process of impurity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9386876A JPS5318954A (en) | 1976-08-05 | 1976-08-05 | Diffusing process of impurity |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5318954A true JPS5318954A (en) | 1978-02-21 |
Family
ID=14094418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9386876A Pending JPS5318954A (en) | 1976-08-05 | 1976-08-05 | Diffusing process of impurity |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5318954A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5571229A (en) * | 1978-11-13 | 1980-05-29 | Noboru Fukuma | Automatic feeder for egg package |
-
1976
- 1976-08-05 JP JP9386876A patent/JPS5318954A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5571229A (en) * | 1978-11-13 | 1980-05-29 | Noboru Fukuma | Automatic feeder for egg package |
JPS5832095B2 (en) * | 1978-11-13 | 1983-07-11 | 昇 福間 | Automatic feeding device for packs for egg packaging |
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