JPS5318954A - Diffusing process of impurity - Google Patents

Diffusing process of impurity

Info

Publication number
JPS5318954A
JPS5318954A JP9386876A JP9386876A JPS5318954A JP S5318954 A JPS5318954 A JP S5318954A JP 9386876 A JP9386876 A JP 9386876A JP 9386876 A JP9386876 A JP 9386876A JP S5318954 A JPS5318954 A JP S5318954A
Authority
JP
Japan
Prior art keywords
impurity
diffusing process
substrate
diffusing
peripheries
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9386876A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Katsunobu Kakizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9386876A priority Critical patent/JPS5318954A/en
Publication of JPS5318954A publication Critical patent/JPS5318954A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain excellent uniformity of the distribution of the diffusion layer resistance in a substrate, by positioning the whole periphery of the substrate within the peripheries of the adjacent diffusion sources.
COPYRIGHT: (C)1978,JPO&Japio
JP9386876A 1976-08-05 1976-08-05 Diffusing process of impurity Pending JPS5318954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9386876A JPS5318954A (en) 1976-08-05 1976-08-05 Diffusing process of impurity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9386876A JPS5318954A (en) 1976-08-05 1976-08-05 Diffusing process of impurity

Publications (1)

Publication Number Publication Date
JPS5318954A true JPS5318954A (en) 1978-02-21

Family

ID=14094418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9386876A Pending JPS5318954A (en) 1976-08-05 1976-08-05 Diffusing process of impurity

Country Status (1)

Country Link
JP (1) JPS5318954A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571229A (en) * 1978-11-13 1980-05-29 Noboru Fukuma Automatic feeder for egg package

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571229A (en) * 1978-11-13 1980-05-29 Noboru Fukuma Automatic feeder for egg package
JPS5832095B2 (en) * 1978-11-13 1983-07-11 昇 福間 Automatic feeding device for packs for egg packaging

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