JPS51140559A - Impurities diffusing to iii-v group compound semi-conductor base plate - Google Patents
Impurities diffusing to iii-v group compound semi-conductor base plateInfo
- Publication number
- JPS51140559A JPS51140559A JP6431575A JP6431575A JPS51140559A JP S51140559 A JPS51140559 A JP S51140559A JP 6431575 A JP6431575 A JP 6431575A JP 6431575 A JP6431575 A JP 6431575A JP S51140559 A JPS51140559 A JP S51140559A
- Authority
- JP
- Japan
- Prior art keywords
- iii
- base plate
- group compound
- conductor base
- compound semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide a method of obtaining low density of diffusion range by forming low density of phosphorous-glass layer in the diffusion range of III-V group compound semi-conductor base plate containing phosphorous, then diffusing impurities.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6431575A JPS51140559A (en) | 1975-05-30 | 1975-05-30 | Impurities diffusing to iii-v group compound semi-conductor base plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6431575A JPS51140559A (en) | 1975-05-30 | 1975-05-30 | Impurities diffusing to iii-v group compound semi-conductor base plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140559A true JPS51140559A (en) | 1976-12-03 |
Family
ID=13254668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6431575A Pending JPS51140559A (en) | 1975-05-30 | 1975-05-30 | Impurities diffusing to iii-v group compound semi-conductor base plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140559A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61274321A (en) * | 1985-05-29 | 1986-12-04 | Sanken Electric Co Ltd | Method for diffusing impurity into compound semiconductor |
JPH06232062A (en) * | 1993-01-28 | 1994-08-19 | Sanken Electric Co Ltd | Method for diffusing zinc in compound semiconductor |
-
1975
- 1975-05-30 JP JP6431575A patent/JPS51140559A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61274321A (en) * | 1985-05-29 | 1986-12-04 | Sanken Electric Co Ltd | Method for diffusing impurity into compound semiconductor |
JPH06232062A (en) * | 1993-01-28 | 1994-08-19 | Sanken Electric Co Ltd | Method for diffusing zinc in compound semiconductor |
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