JPS53128978A - Impurity diffusion method - Google Patents
Impurity diffusion methodInfo
- Publication number
- JPS53128978A JPS53128978A JP4355177A JP4355177A JPS53128978A JP S53128978 A JPS53128978 A JP S53128978A JP 4355177 A JP4355177 A JP 4355177A JP 4355177 A JP4355177 A JP 4355177A JP S53128978 A JPS53128978 A JP S53128978A
- Authority
- JP
- Japan
- Prior art keywords
- impurity diffusion
- diffusion method
- ensure
- formation
- diffusion layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To ensure a formation of a uniform impurity diffusion layer with good reproducing performance.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4355177A JPS53128978A (en) | 1977-04-18 | 1977-04-18 | Impurity diffusion method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4355177A JPS53128978A (en) | 1977-04-18 | 1977-04-18 | Impurity diffusion method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53128978A true JPS53128978A (en) | 1978-11-10 |
Family
ID=12666879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4355177A Pending JPS53128978A (en) | 1977-04-18 | 1977-04-18 | Impurity diffusion method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53128978A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5695330A (en) * | 1979-11-20 | 1981-08-01 | Fujitsu Ltd | Vapor phase growing apparatus |
-
1977
- 1977-04-18 JP JP4355177A patent/JPS53128978A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5695330A (en) * | 1979-11-20 | 1981-08-01 | Fujitsu Ltd | Vapor phase growing apparatus |
JPS5858319B2 (en) * | 1979-11-20 | 1983-12-24 | 富士通株式会社 | Vapor phase growth equipment |
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