JPS53128978A - Impurity diffusion method - Google Patents

Impurity diffusion method

Info

Publication number
JPS53128978A
JPS53128978A JP4355177A JP4355177A JPS53128978A JP S53128978 A JPS53128978 A JP S53128978A JP 4355177 A JP4355177 A JP 4355177A JP 4355177 A JP4355177 A JP 4355177A JP S53128978 A JPS53128978 A JP S53128978A
Authority
JP
Japan
Prior art keywords
impurity diffusion
diffusion method
ensure
formation
diffusion layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4355177A
Other languages
Japanese (ja)
Inventor
Ryozo Akaha
Kazunari Kobayashi
Minoru Wada
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4355177A priority Critical patent/JPS53128978A/en
Publication of JPS53128978A publication Critical patent/JPS53128978A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To ensure a formation of a uniform impurity diffusion layer with good reproducing performance.
COPYRIGHT: (C)1978,JPO&Japio
JP4355177A 1977-04-18 1977-04-18 Impurity diffusion method Pending JPS53128978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4355177A JPS53128978A (en) 1977-04-18 1977-04-18 Impurity diffusion method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4355177A JPS53128978A (en) 1977-04-18 1977-04-18 Impurity diffusion method

Publications (1)

Publication Number Publication Date
JPS53128978A true JPS53128978A (en) 1978-11-10

Family

ID=12666879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4355177A Pending JPS53128978A (en) 1977-04-18 1977-04-18 Impurity diffusion method

Country Status (1)

Country Link
JP (1) JPS53128978A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5695330A (en) * 1979-11-20 1981-08-01 Fujitsu Ltd Vapor phase growing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5695330A (en) * 1979-11-20 1981-08-01 Fujitsu Ltd Vapor phase growing apparatus
JPS5858319B2 (en) * 1979-11-20 1983-12-24 富士通株式会社 Vapor phase growth equipment

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