JPS52122475A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52122475A JPS52122475A JP3960976A JP3960976A JPS52122475A JP S52122475 A JPS52122475 A JP S52122475A JP 3960976 A JP3960976 A JP 3960976A JP 3960976 A JP3960976 A JP 3960976A JP S52122475 A JPS52122475 A JP S52122475A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- grooves
- cracking
- scribing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent film cracking by beforehand forming plural grooves in insulation films, and laser-scribing the grooves or their middle part, then cracking to chips.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3960976A JPS52122475A (en) | 1976-04-07 | 1976-04-07 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3960976A JPS52122475A (en) | 1976-04-07 | 1976-04-07 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52122475A true JPS52122475A (en) | 1977-10-14 |
Family
ID=12557843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3960976A Pending JPS52122475A (en) | 1976-04-07 | 1976-04-07 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52122475A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02292113A (en) * | 1989-04-28 | 1990-12-03 | Matsushita Electric Ind Co Ltd | Cutting method |
-
1976
- 1976-04-07 JP JP3960976A patent/JPS52122475A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02292113A (en) * | 1989-04-28 | 1990-12-03 | Matsushita Electric Ind Co Ltd | Cutting method |
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