JPS52122475A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52122475A
JPS52122475A JP3960976A JP3960976A JPS52122475A JP S52122475 A JPS52122475 A JP S52122475A JP 3960976 A JP3960976 A JP 3960976A JP 3960976 A JP3960976 A JP 3960976A JP S52122475 A JPS52122475 A JP S52122475A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
grooves
cracking
scribing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3960976A
Other languages
Japanese (ja)
Inventor
Toshiyuki Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3960976A priority Critical patent/JPS52122475A/en
Publication of JPS52122475A publication Critical patent/JPS52122475A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent film cracking by beforehand forming plural grooves in insulation films, and laser-scribing the grooves or their middle part, then cracking to chips.
COPYRIGHT: (C)1977,JPO&Japio
JP3960976A 1976-04-07 1976-04-07 Production of semiconductor device Pending JPS52122475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3960976A JPS52122475A (en) 1976-04-07 1976-04-07 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3960976A JPS52122475A (en) 1976-04-07 1976-04-07 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52122475A true JPS52122475A (en) 1977-10-14

Family

ID=12557843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3960976A Pending JPS52122475A (en) 1976-04-07 1976-04-07 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52122475A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02292113A (en) * 1989-04-28 1990-12-03 Matsushita Electric Ind Co Ltd Cutting method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02292113A (en) * 1989-04-28 1990-12-03 Matsushita Electric Ind Co Ltd Cutting method

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