JPS5345991A - Manufacture of semiconductor - Google Patents
Manufacture of semiconductorInfo
- Publication number
- JPS5345991A JPS5345991A JP12112676A JP12112676A JPS5345991A JP S5345991 A JPS5345991 A JP S5345991A JP 12112676 A JP12112676 A JP 12112676A JP 12112676 A JP12112676 A JP 12112676A JP S5345991 A JPS5345991 A JP S5345991A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- wiring
- film
- durability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: Al2O3 film which covers an Al wiring is turned into an Al-O-F film through the plasma of mixed gases of O2 and CF4 , thereby improving the durability of the Al wiring.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12112676A JPS5345991A (en) | 1976-10-07 | 1976-10-07 | Manufacture of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12112676A JPS5345991A (en) | 1976-10-07 | 1976-10-07 | Manufacture of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5345991A true JPS5345991A (en) | 1978-04-25 |
Family
ID=14803514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12112676A Pending JPS5345991A (en) | 1976-10-07 | 1976-10-07 | Manufacture of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5345991A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005217413A (en) * | 2004-01-29 | 2005-08-11 | Samsung Electronics Co Ltd | Magnetic memory device, manufacturing method thereof, and reaction chamber |
-
1976
- 1976-10-07 JP JP12112676A patent/JPS5345991A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005217413A (en) * | 2004-01-29 | 2005-08-11 | Samsung Electronics Co Ltd | Magnetic memory device, manufacturing method thereof, and reaction chamber |
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