JPS5345991A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS5345991A
JPS5345991A JP12112676A JP12112676A JPS5345991A JP S5345991 A JPS5345991 A JP S5345991A JP 12112676 A JP12112676 A JP 12112676A JP 12112676 A JP12112676 A JP 12112676A JP S5345991 A JPS5345991 A JP S5345991A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
wiring
film
durability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12112676A
Other languages
Japanese (ja)
Inventor
Toshihiko Ono
Makoto Nakajima
Shoji Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12112676A priority Critical patent/JPS5345991A/en
Publication of JPS5345991A publication Critical patent/JPS5345991A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Al2O3 film which covers an Al wiring is turned into an Al-O-F film through the plasma of mixed gases of O2 and CF4 , thereby improving the durability of the Al wiring.
COPYRIGHT: (C)1978,JPO&Japio
JP12112676A 1976-10-07 1976-10-07 Manufacture of semiconductor Pending JPS5345991A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12112676A JPS5345991A (en) 1976-10-07 1976-10-07 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12112676A JPS5345991A (en) 1976-10-07 1976-10-07 Manufacture of semiconductor

Publications (1)

Publication Number Publication Date
JPS5345991A true JPS5345991A (en) 1978-04-25

Family

ID=14803514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12112676A Pending JPS5345991A (en) 1976-10-07 1976-10-07 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS5345991A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005217413A (en) * 2004-01-29 2005-08-11 Samsung Electronics Co Ltd Magnetic memory device, manufacturing method thereof, and reaction chamber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005217413A (en) * 2004-01-29 2005-08-11 Samsung Electronics Co Ltd Magnetic memory device, manufacturing method thereof, and reaction chamber

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