JPS5325366A - Plasma treating method and apparat us - Google Patents
Plasma treating method and apparat usInfo
- Publication number
- JPS5325366A JPS5325366A JP9968476A JP9968476A JPS5325366A JP S5325366 A JPS5325366 A JP S5325366A JP 9968476 A JP9968476 A JP 9968476A JP 9968476 A JP9968476 A JP 9968476A JP S5325366 A JPS5325366 A JP S5325366A
- Authority
- JP
- Japan
- Prior art keywords
- apparat
- plasma
- treating method
- plasma treating
- flows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make possible easy generation of various plasma flows and expand the application range of deposition and etching by plasma flows using a plasma transport method by removing the restrictions on the plasma forming materials to be used.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9968476A JPS5325366A (en) | 1976-08-23 | 1976-08-23 | Plasma treating method and apparat us |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9968476A JPS5325366A (en) | 1976-08-23 | 1976-08-23 | Plasma treating method and apparat us |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5325366A true JPS5325366A (en) | 1978-03-09 |
Family
ID=14253854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9968476A Pending JPS5325366A (en) | 1976-08-23 | 1976-08-23 | Plasma treating method and apparat us |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5325366A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5665142A (en) * | 1979-11-01 | 1981-06-02 | Fuji Photo Film Co Ltd | Manufacture of electrophotographic receptor |
JPH0434704U (en) * | 1990-07-16 | 1992-03-23 | ||
JP2008053549A (en) * | 2006-08-25 | 2008-03-06 | Matsushita Electric Ind Co Ltd | Method and device for mounting circuit on display panel |
-
1976
- 1976-08-23 JP JP9968476A patent/JPS5325366A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5665142A (en) * | 1979-11-01 | 1981-06-02 | Fuji Photo Film Co Ltd | Manufacture of electrophotographic receptor |
JPS6161384B2 (en) * | 1979-11-01 | 1986-12-25 | Fuji Photo Film Co Ltd | |
JPH0434704U (en) * | 1990-07-16 | 1992-03-23 | ||
JP2008053549A (en) * | 2006-08-25 | 2008-03-06 | Matsushita Electric Ind Co Ltd | Method and device for mounting circuit on display panel |
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