JPS53118372A - Pattern formation by plasma etching method - Google Patents
Pattern formation by plasma etching methodInfo
- Publication number
- JPS53118372A JPS53118372A JP3361577A JP3361577A JPS53118372A JP S53118372 A JPS53118372 A JP S53118372A JP 3361577 A JP3361577 A JP 3361577A JP 3361577 A JP3361577 A JP 3361577A JP S53118372 A JPS53118372 A JP S53118372A
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- etching method
- pattern formation
- pattern
- material layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a minute pattern in an accurate way by using two material layers of different component materials and furthermore by using the etching gas corresponding to the material layers when forming a pattern through plasma etching method.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3361577A JPS53118372A (en) | 1977-03-26 | 1977-03-26 | Pattern formation by plasma etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3361577A JPS53118372A (en) | 1977-03-26 | 1977-03-26 | Pattern formation by plasma etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53118372A true JPS53118372A (en) | 1978-10-16 |
Family
ID=12391350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3361577A Pending JPS53118372A (en) | 1977-03-26 | 1977-03-26 | Pattern formation by plasma etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53118372A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56146236A (en) * | 1980-04-16 | 1981-11-13 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1977
- 1977-03-26 JP JP3361577A patent/JPS53118372A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56146236A (en) * | 1980-04-16 | 1981-11-13 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
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