JPS52149982A - Forming method of electrode patterns - Google Patents

Forming method of electrode patterns

Info

Publication number
JPS52149982A
JPS52149982A JP6748276A JP6748276A JPS52149982A JP S52149982 A JPS52149982 A JP S52149982A JP 6748276 A JP6748276 A JP 6748276A JP 6748276 A JP6748276 A JP 6748276A JP S52149982 A JPS52149982 A JP S52149982A
Authority
JP
Japan
Prior art keywords
electrode patterns
forming method
electrode
material layer
mask material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6748276A
Other languages
Japanese (ja)
Other versions
JPS5849018B2 (en
Inventor
Norio Suzuki
Yoshio Nagakubo
Akira Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP6748276A priority Critical patent/JPS5849018B2/en
Publication of JPS52149982A publication Critical patent/JPS52149982A/en
Publication of JPS5849018B2 publication Critical patent/JPS5849018B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To prevent "cramping" of a mask material layer owing to the stress generated within evaporating materials and avoid the deformation of electrode pattenrs by providing second blank portions in proximity to first blank portions of a mask material layer for formation of electrode patterns and evaporating electrode metal in this state.
COPYRIGHT: (C)1977,JPO&Japio
JP6748276A 1976-06-09 1976-06-09 Method of forming electrode pattern Expired JPS5849018B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6748276A JPS5849018B2 (en) 1976-06-09 1976-06-09 Method of forming electrode pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6748276A JPS5849018B2 (en) 1976-06-09 1976-06-09 Method of forming electrode pattern

Publications (2)

Publication Number Publication Date
JPS52149982A true JPS52149982A (en) 1977-12-13
JPS5849018B2 JPS5849018B2 (en) 1983-11-01

Family

ID=13346227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6748276A Expired JPS5849018B2 (en) 1976-06-09 1976-06-09 Method of forming electrode pattern

Country Status (1)

Country Link
JP (1) JPS5849018B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940535A (en) * 1982-08-30 1984-03-06 Agency Of Ind Science & Technol Manufacture of resist pattern
JPS6080221A (en) * 1983-10-11 1985-05-08 Oki Electric Ind Co Ltd Method for forming electrode by liftoff process
JPS61216433A (en) * 1985-03-22 1986-09-26 Mitsubishi Electric Corp Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940535A (en) * 1982-08-30 1984-03-06 Agency Of Ind Science & Technol Manufacture of resist pattern
JPS6080221A (en) * 1983-10-11 1985-05-08 Oki Electric Ind Co Ltd Method for forming electrode by liftoff process
JPS61216433A (en) * 1985-03-22 1986-09-26 Mitsubishi Electric Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5849018B2 (en) 1983-11-01

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