JPS5381079A - Mask forming method - Google Patents
Mask forming methodInfo
- Publication number
- JPS5381079A JPS5381079A JP15838276A JP15838276A JPS5381079A JP S5381079 A JPS5381079 A JP S5381079A JP 15838276 A JP15838276 A JP 15838276A JP 15838276 A JP15838276 A JP 15838276A JP S5381079 A JPS5381079 A JP S5381079A
- Authority
- JP
- Japan
- Prior art keywords
- forming method
- mask forming
- layer
- mask
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To improve the adhesion between both and produce a mask of precision patterns by interposing a surface treating agent layer between a substrate and a resist layer and heating the layer to make it insoluble with resist developing solutions.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15838276A JPS5381079A (en) | 1976-12-27 | 1976-12-27 | Mask forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15838276A JPS5381079A (en) | 1976-12-27 | 1976-12-27 | Mask forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5381079A true JPS5381079A (en) | 1978-07-18 |
Family
ID=15670482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15838276A Pending JPS5381079A (en) | 1976-12-27 | 1976-12-27 | Mask forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5381079A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11442409B2 (en) | 2018-10-12 | 2022-09-13 | Blancpain Sa | Device for adjusting a retrograde timepiece display |
-
1976
- 1976-12-27 JP JP15838276A patent/JPS5381079A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11442409B2 (en) | 2018-10-12 | 2022-09-13 | Blancpain Sa | Device for adjusting a retrograde timepiece display |
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