JPS52113679A - Sputter etching method - Google Patents
Sputter etching methodInfo
- Publication number
- JPS52113679A JPS52113679A JP3033676A JP3033676A JPS52113679A JP S52113679 A JPS52113679 A JP S52113679A JP 3033676 A JP3033676 A JP 3033676A JP 3033676 A JP3033676 A JP 3033676A JP S52113679 A JPS52113679 A JP S52113679A
- Authority
- JP
- Japan
- Prior art keywords
- sputter etching
- etching method
- mask material
- covering
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent delamination of film during sputter etching and improve yield by covering a conductive mask material further on the outside of the mask material on the outermost side in pattern forming regions.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3033676A JPS52113679A (en) | 1976-03-19 | 1976-03-19 | Sputter etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3033676A JPS52113679A (en) | 1976-03-19 | 1976-03-19 | Sputter etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52113679A true JPS52113679A (en) | 1977-09-22 |
Family
ID=12300966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3033676A Pending JPS52113679A (en) | 1976-03-19 | 1976-03-19 | Sputter etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52113679A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62115882A (en) * | 1985-11-15 | 1987-05-27 | Agency Of Ind Science & Technol | Manufacture of josephson junction element |
-
1976
- 1976-03-19 JP JP3033676A patent/JPS52113679A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62115882A (en) * | 1985-11-15 | 1987-05-27 | Agency Of Ind Science & Technol | Manufacture of josephson junction element |
JPH0513394B2 (en) * | 1985-11-15 | 1993-02-22 | Kogyo Gijutsuin |
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