JPS5227371A - Pattern film formed on upper surface of substrate - Google Patents
Pattern film formed on upper surface of substrateInfo
- Publication number
- JPS5227371A JPS5227371A JP10302775A JP10302775A JPS5227371A JP S5227371 A JPS5227371 A JP S5227371A JP 10302775 A JP10302775 A JP 10302775A JP 10302775 A JP10302775 A JP 10302775A JP S5227371 A JPS5227371 A JP S5227371A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film formed
- pattern film
- pattern
- specified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: Against 1st pattern composed of more than two patterns formed on substrate, 2nd pattern film of a specified size is formed at a specified area onto the 1st pattern.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10302775A JPS5227371A (en) | 1975-08-27 | 1975-08-27 | Pattern film formed on upper surface of substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10302775A JPS5227371A (en) | 1975-08-27 | 1975-08-27 | Pattern film formed on upper surface of substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5227371A true JPS5227371A (en) | 1977-03-01 |
Family
ID=14343151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10302775A Pending JPS5227371A (en) | 1975-08-27 | 1975-08-27 | Pattern film formed on upper surface of substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5227371A (en) |
-
1975
- 1975-08-27 JP JP10302775A patent/JPS5227371A/en active Pending
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