JPS5227371A - Pattern film formed on upper surface of substrate - Google Patents

Pattern film formed on upper surface of substrate

Info

Publication number
JPS5227371A
JPS5227371A JP10302775A JP10302775A JPS5227371A JP S5227371 A JPS5227371 A JP S5227371A JP 10302775 A JP10302775 A JP 10302775A JP 10302775 A JP10302775 A JP 10302775A JP S5227371 A JPS5227371 A JP S5227371A
Authority
JP
Japan
Prior art keywords
substrate
film formed
pattern film
pattern
specified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10302775A
Other languages
Japanese (ja)
Inventor
Akihiro Tomosawa
Masayasu Tsunematsu
Yasunobu Osa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10302775A priority Critical patent/JPS5227371A/en
Publication of JPS5227371A publication Critical patent/JPS5227371A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Against 1st pattern composed of more than two patterns formed on substrate, 2nd pattern film of a specified size is formed at a specified area onto the 1st pattern.
COPYRIGHT: (C)1977,JPO&Japio
JP10302775A 1975-08-27 1975-08-27 Pattern film formed on upper surface of substrate Pending JPS5227371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10302775A JPS5227371A (en) 1975-08-27 1975-08-27 Pattern film formed on upper surface of substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10302775A JPS5227371A (en) 1975-08-27 1975-08-27 Pattern film formed on upper surface of substrate

Publications (1)

Publication Number Publication Date
JPS5227371A true JPS5227371A (en) 1977-03-01

Family

ID=14343151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10302775A Pending JPS5227371A (en) 1975-08-27 1975-08-27 Pattern film formed on upper surface of substrate

Country Status (1)

Country Link
JP (1) JPS5227371A (en)

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