JPS5398783A - X-ray copying mask - Google Patents

X-ray copying mask

Info

Publication number
JPS5398783A
JPS5398783A JP1240377A JP1240377A JPS5398783A JP S5398783 A JPS5398783 A JP S5398783A JP 1240377 A JP1240377 A JP 1240377A JP 1240377 A JP1240377 A JP 1240377A JP S5398783 A JPS5398783 A JP S5398783A
Authority
JP
Japan
Prior art keywords
mask
ray
copying mask
ray copying
leeping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1240377A
Other languages
Japanese (ja)
Other versions
JPS548068B2 (en
Inventor
Kayao Takemoto
Masaru Miyazaki
Yasunao Saito
Yoshiaki Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP1240377A priority Critical patent/JPS5398783A/en
Publication of JPS5398783A publication Critical patent/JPS5398783A/en
Publication of JPS548068B2 publication Critical patent/JPS548068B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the bend of the mask plate, by fixing one base surface of the ring and the surface of the mask substrate having the mask pattern on the same plane or parallely each other through leeping a given distance.
COPYRIGHT: (C)1978,JPO&Japio
JP1240377A 1977-02-09 1977-02-09 X-ray copying mask Granted JPS5398783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1240377A JPS5398783A (en) 1977-02-09 1977-02-09 X-ray copying mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1240377A JPS5398783A (en) 1977-02-09 1977-02-09 X-ray copying mask

Publications (2)

Publication Number Publication Date
JPS5398783A true JPS5398783A (en) 1978-08-29
JPS548068B2 JPS548068B2 (en) 1979-04-12

Family

ID=11804283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1240377A Granted JPS5398783A (en) 1977-02-09 1977-02-09 X-ray copying mask

Country Status (1)

Country Link
JP (1) JPS5398783A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01191422A (en) * 1988-01-27 1989-08-01 Fujitsu Ltd Manufacture of x-ray mask
JPH01266722A (en) * 1988-04-18 1989-10-24 Fujitsu Ltd Preparation of mask for x-ray exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01191422A (en) * 1988-01-27 1989-08-01 Fujitsu Ltd Manufacture of x-ray mask
JPH01266722A (en) * 1988-04-18 1989-10-24 Fujitsu Ltd Preparation of mask for x-ray exposure

Also Published As

Publication number Publication date
JPS548068B2 (en) 1979-04-12

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