JPS5398783A - X-ray copying mask - Google Patents
X-ray copying maskInfo
- Publication number
- JPS5398783A JPS5398783A JP1240377A JP1240377A JPS5398783A JP S5398783 A JPS5398783 A JP S5398783A JP 1240377 A JP1240377 A JP 1240377A JP 1240377 A JP1240377 A JP 1240377A JP S5398783 A JPS5398783 A JP S5398783A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- ray
- copying mask
- ray copying
- leeping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To reduce the bend of the mask plate, by fixing one base surface of the ring and the surface of the mask substrate having the mask pattern on the same plane or parallely each other through leeping a given distance.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1240377A JPS5398783A (en) | 1977-02-09 | 1977-02-09 | X-ray copying mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1240377A JPS5398783A (en) | 1977-02-09 | 1977-02-09 | X-ray copying mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5398783A true JPS5398783A (en) | 1978-08-29 |
JPS548068B2 JPS548068B2 (en) | 1979-04-12 |
Family
ID=11804283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1240377A Granted JPS5398783A (en) | 1977-02-09 | 1977-02-09 | X-ray copying mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5398783A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01191422A (en) * | 1988-01-27 | 1989-08-01 | Fujitsu Ltd | Manufacture of x-ray mask |
JPH01266722A (en) * | 1988-04-18 | 1989-10-24 | Fujitsu Ltd | Preparation of mask for x-ray exposure |
-
1977
- 1977-02-09 JP JP1240377A patent/JPS5398783A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01191422A (en) * | 1988-01-27 | 1989-08-01 | Fujitsu Ltd | Manufacture of x-ray mask |
JPH01266722A (en) * | 1988-04-18 | 1989-10-24 | Fujitsu Ltd | Preparation of mask for x-ray exposure |
Also Published As
Publication number | Publication date |
---|---|
JPS548068B2 (en) | 1979-04-12 |
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