JPS5429976A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5429976A
JPS5429976A JP9589877A JP9589877A JPS5429976A JP S5429976 A JPS5429976 A JP S5429976A JP 9589877 A JP9589877 A JP 9589877A JP 9589877 A JP9589877 A JP 9589877A JP S5429976 A JPS5429976 A JP S5429976A
Authority
JP
Japan
Prior art keywords
mask
manufacture
semiconductor device
exposure
evade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9589877A
Other languages
Japanese (ja)
Inventor
Junichi Kitanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP9589877A priority Critical patent/JPS5429976A/en
Publication of JPS5429976A publication Critical patent/JPS5429976A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To evade the generation of an unexposed part due to the dust, etc., by shifting the relative position between a mask and semiconductor substrate or by achieving exposure once or more with the mask replaced after the 1st exposure of a photo resist film via the mask.
COPYRIGHT: (C)1979,JPO&Japio
JP9589877A 1977-08-10 1977-08-10 Manufacture of semiconductor device Pending JPS5429976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9589877A JPS5429976A (en) 1977-08-10 1977-08-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9589877A JPS5429976A (en) 1977-08-10 1977-08-10 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5429976A true JPS5429976A (en) 1979-03-06

Family

ID=14150114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9589877A Pending JPS5429976A (en) 1977-08-10 1977-08-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5429976A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116625A (en) * 1980-02-20 1981-09-12 Sanyo Electric Co Ltd Exposure of fine pattern
JPS6115140A (en) * 1984-07-02 1986-01-23 Fujitsu Ltd Formation of pattern
JP2007164085A (en) * 2005-11-15 2007-06-28 Nsk Ltd Proximity exposure method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833908A (en) * 1971-09-01 1973-05-15
JPS4852479A (en) * 1971-11-05 1973-07-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833908A (en) * 1971-09-01 1973-05-15
JPS4852479A (en) * 1971-11-05 1973-07-23

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116625A (en) * 1980-02-20 1981-09-12 Sanyo Electric Co Ltd Exposure of fine pattern
JPS6115140A (en) * 1984-07-02 1986-01-23 Fujitsu Ltd Formation of pattern
JPH0526182B2 (en) * 1984-07-02 1993-04-15 Fujitsu Ltd
JP2007164085A (en) * 2005-11-15 2007-06-28 Nsk Ltd Proximity exposure method

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