JPS5366375A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5366375A JPS5366375A JP14247176A JP14247176A JPS5366375A JP S5366375 A JPS5366375 A JP S5366375A JP 14247176 A JP14247176 A JP 14247176A JP 14247176 A JP14247176 A JP 14247176A JP S5366375 A JPS5366375 A JP S5366375A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- pattern
- exposing
- resist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
PURPOSE: To leave the photo resist film in matching with the exposing pattern and to form accurate pattern, by making plasma incineration and by incinerating the part not exposed first than the exposed part after exposing with a given pattern to the photo resist film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14247176A JPS5366375A (en) | 1976-11-26 | 1976-11-26 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14247176A JPS5366375A (en) | 1976-11-26 | 1976-11-26 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5366375A true JPS5366375A (en) | 1978-06-13 |
Family
ID=15316079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14247176A Pending JPS5366375A (en) | 1976-11-26 | 1976-11-26 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5366375A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5744143A (en) * | 1980-08-29 | 1982-03-12 | Tokyo Ohka Kogyo Co Ltd | Composition and method for forming micropattern |
-
1976
- 1976-11-26 JP JP14247176A patent/JPS5366375A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5744143A (en) * | 1980-08-29 | 1982-03-12 | Tokyo Ohka Kogyo Co Ltd | Composition and method for forming micropattern |
JPS6341047B2 (en) * | 1980-08-29 | 1988-08-15 | Tokyo Oka Kogyo Kk |
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