JPS5244570A - Photoetching method - Google Patents

Photoetching method

Info

Publication number
JPS5244570A
JPS5244570A JP12091375A JP12091375A JPS5244570A JP S5244570 A JPS5244570 A JP S5244570A JP 12091375 A JP12091375 A JP 12091375A JP 12091375 A JP12091375 A JP 12091375A JP S5244570 A JPS5244570 A JP S5244570A
Authority
JP
Japan
Prior art keywords
photoetching method
photoetching
resist
preventing
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12091375A
Other languages
Japanese (ja)
Inventor
Masato Tanaka
Takehiko Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12091375A priority Critical patent/JPS5244570A/en
Publication of JPS5244570A publication Critical patent/JPS5244570A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To make ion implantation in a first positive type photoresist layer thereby preventing the effect of photoetching of second resist and making accurate and fine holes on the resist film.
COPYRIGHT: (C)1977,JPO&Japio
JP12091375A 1975-10-07 1975-10-07 Photoetching method Pending JPS5244570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12091375A JPS5244570A (en) 1975-10-07 1975-10-07 Photoetching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12091375A JPS5244570A (en) 1975-10-07 1975-10-07 Photoetching method

Publications (1)

Publication Number Publication Date
JPS5244570A true JPS5244570A (en) 1977-04-07

Family

ID=14798084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12091375A Pending JPS5244570A (en) 1975-10-07 1975-10-07 Photoetching method

Country Status (1)

Country Link
JP (1) JPS5244570A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427369A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Pattern formation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427369A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Pattern formation method

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