JPS5267269A - Photo etching method - Google Patents

Photo etching method

Info

Publication number
JPS5267269A
JPS5267269A JP50143469A JP14346975A JPS5267269A JP S5267269 A JPS5267269 A JP S5267269A JP 50143469 A JP50143469 A JP 50143469A JP 14346975 A JP14346975 A JP 14346975A JP S5267269 A JPS5267269 A JP S5267269A
Authority
JP
Japan
Prior art keywords
etching method
photo etching
assured
etching
ensure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50143469A
Other languages
Japanese (ja)
Inventor
Shigeru Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50143469A priority Critical patent/JPS5267269A/en
Publication of JPS5267269A publication Critical patent/JPS5267269A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To ensure an assured etching by preventing pinhole and stage breakage of photo resist film even for micro pattern.
COPYRIGHT: (C)1977,JPO&Japio
JP50143469A 1975-12-01 1975-12-01 Photo etching method Pending JPS5267269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50143469A JPS5267269A (en) 1975-12-01 1975-12-01 Photo etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50143469A JPS5267269A (en) 1975-12-01 1975-12-01 Photo etching method

Publications (1)

Publication Number Publication Date
JPS5267269A true JPS5267269A (en) 1977-06-03

Family

ID=15339421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50143469A Pending JPS5267269A (en) 1975-12-01 1975-12-01 Photo etching method

Country Status (1)

Country Link
JP (1) JPS5267269A (en)

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