JPS51142276A - Method of exposing photo-resist - Google Patents
Method of exposing photo-resistInfo
- Publication number
- JPS51142276A JPS51142276A JP6609075A JP6609075A JPS51142276A JP S51142276 A JPS51142276 A JP S51142276A JP 6609075 A JP6609075 A JP 6609075A JP 6609075 A JP6609075 A JP 6609075A JP S51142276 A JPS51142276 A JP S51142276A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- exposing
- exposing photo
- photo
- resists
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To prevent chain reaction without degrading resolution in exposing usual photo-resists.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6609075A JPS51142276A (en) | 1975-06-03 | 1975-06-03 | Method of exposing photo-resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6609075A JPS51142276A (en) | 1975-06-03 | 1975-06-03 | Method of exposing photo-resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51142276A true JPS51142276A (en) | 1976-12-07 |
Family
ID=13305802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6609075A Pending JPS51142276A (en) | 1975-06-03 | 1975-06-03 | Method of exposing photo-resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51142276A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5384478A (en) * | 1976-12-29 | 1978-07-25 | Fujitsu Ltd | Forming method for micropattern |
JPS5979546A (en) * | 1982-10-29 | 1984-05-08 | Toshiba Corp | Cassette device |
-
1975
- 1975-06-03 JP JP6609075A patent/JPS51142276A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5384478A (en) * | 1976-12-29 | 1978-07-25 | Fujitsu Ltd | Forming method for micropattern |
JPS5979546A (en) * | 1982-10-29 | 1984-05-08 | Toshiba Corp | Cassette device |
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