JPS51142276A - Method of exposing photo-resist - Google Patents

Method of exposing photo-resist

Info

Publication number
JPS51142276A
JPS51142276A JP6609075A JP6609075A JPS51142276A JP S51142276 A JPS51142276 A JP S51142276A JP 6609075 A JP6609075 A JP 6609075A JP 6609075 A JP6609075 A JP 6609075A JP S51142276 A JPS51142276 A JP S51142276A
Authority
JP
Japan
Prior art keywords
resist
exposing
exposing photo
photo
resists
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6609075A
Other languages
Japanese (ja)
Inventor
Yasutaka Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6609075A priority Critical patent/JPS51142276A/en
Publication of JPS51142276A publication Critical patent/JPS51142276A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prevent chain reaction without degrading resolution in exposing usual photo-resists.
COPYRIGHT: (C)1976,JPO&Japio
JP6609075A 1975-06-03 1975-06-03 Method of exposing photo-resist Pending JPS51142276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6609075A JPS51142276A (en) 1975-06-03 1975-06-03 Method of exposing photo-resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6609075A JPS51142276A (en) 1975-06-03 1975-06-03 Method of exposing photo-resist

Publications (1)

Publication Number Publication Date
JPS51142276A true JPS51142276A (en) 1976-12-07

Family

ID=13305802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6609075A Pending JPS51142276A (en) 1975-06-03 1975-06-03 Method of exposing photo-resist

Country Status (1)

Country Link
JP (1) JPS51142276A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5384478A (en) * 1976-12-29 1978-07-25 Fujitsu Ltd Forming method for micropattern
JPS5979546A (en) * 1982-10-29 1984-05-08 Toshiba Corp Cassette device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5384478A (en) * 1976-12-29 1978-07-25 Fujitsu Ltd Forming method for micropattern
JPS5979546A (en) * 1982-10-29 1984-05-08 Toshiba Corp Cassette device

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