JPS5210680A - Method of manufacturing photo-mask for photo etching - Google Patents
Method of manufacturing photo-mask for photo etchingInfo
- Publication number
- JPS5210680A JPS5210680A JP7175475A JP7175475A JPS5210680A JP S5210680 A JPS5210680 A JP S5210680A JP 7175475 A JP7175475 A JP 7175475A JP 7175475 A JP7175475 A JP 7175475A JP S5210680 A JPS5210680 A JP S5210680A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- mask
- etching
- manufacturing
- photo etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE: To obtain an inversion photo-mask for photo-etching with the use of a hard mask per se by driving particles accelerated by high energy in a photo-resist film or other organic film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50071754A JPS5836494B2 (en) | 1975-06-13 | 1975-06-13 | Mask-no-seizou-houhou |
US05/613,427 US4068018A (en) | 1974-09-19 | 1975-09-15 | Process for preparing a mask for use in manufacturing a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50071754A JPS5836494B2 (en) | 1975-06-13 | 1975-06-13 | Mask-no-seizou-houhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5210680A true JPS5210680A (en) | 1977-01-27 |
JPS5836494B2 JPS5836494B2 (en) | 1983-08-09 |
Family
ID=13469627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50071754A Expired JPS5836494B2 (en) | 1974-09-19 | 1975-06-13 | Mask-no-seizou-houhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5836494B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5848055A (en) * | 1981-09-17 | 1983-03-19 | Mizuho Shoji Kk | Production of original plate for engraver |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63292004A (en) * | 1987-05-25 | 1988-11-29 | Kobe Steel Ltd | Positional detection |
-
1975
- 1975-06-13 JP JP50071754A patent/JPS5836494B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5848055A (en) * | 1981-09-17 | 1983-03-19 | Mizuho Shoji Kk | Production of original plate for engraver |
Also Published As
Publication number | Publication date |
---|---|
JPS5836494B2 (en) | 1983-08-09 |
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