JPS5440080A - Forming method of photo resist film - Google Patents

Forming method of photo resist film

Info

Publication number
JPS5440080A
JPS5440080A JP10700277A JP10700277A JPS5440080A JP S5440080 A JPS5440080 A JP S5440080A JP 10700277 A JP10700277 A JP 10700277A JP 10700277 A JP10700277 A JP 10700277A JP S5440080 A JPS5440080 A JP S5440080A
Authority
JP
Japan
Prior art keywords
resist film
photo resist
forming method
film
excels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10700277A
Other languages
Japanese (ja)
Inventor
Shigemi Tachiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10700277A priority Critical patent/JPS5440080A/en
Publication of JPS5440080A publication Critical patent/JPS5440080A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To obtain a high-accuracy photo resist film which excels in the anti-heat/ anti-voltage property, by giving a plasma etching to the negative resist film via the positive resist mask on the film.
COPYRIGHT: (C)1979,JPO&Japio
JP10700277A 1977-09-05 1977-09-05 Forming method of photo resist film Pending JPS5440080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10700277A JPS5440080A (en) 1977-09-05 1977-09-05 Forming method of photo resist film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10700277A JPS5440080A (en) 1977-09-05 1977-09-05 Forming method of photo resist film

Publications (1)

Publication Number Publication Date
JPS5440080A true JPS5440080A (en) 1979-03-28

Family

ID=14447985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10700277A Pending JPS5440080A (en) 1977-09-05 1977-09-05 Forming method of photo resist film

Country Status (1)

Country Link
JP (1) JPS5440080A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04100185U (en) * 1991-02-01 1992-08-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04100185U (en) * 1991-02-01 1992-08-28

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