JPS5440080A - Forming method of photo resist film - Google Patents
Forming method of photo resist filmInfo
- Publication number
- JPS5440080A JPS5440080A JP10700277A JP10700277A JPS5440080A JP S5440080 A JPS5440080 A JP S5440080A JP 10700277 A JP10700277 A JP 10700277A JP 10700277 A JP10700277 A JP 10700277A JP S5440080 A JPS5440080 A JP S5440080A
- Authority
- JP
- Japan
- Prior art keywords
- resist film
- photo resist
- forming method
- film
- excels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To obtain a high-accuracy photo resist film which excels in the anti-heat/ anti-voltage property, by giving a plasma etching to the negative resist film via the positive resist mask on the film.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10700277A JPS5440080A (en) | 1977-09-05 | 1977-09-05 | Forming method of photo resist film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10700277A JPS5440080A (en) | 1977-09-05 | 1977-09-05 | Forming method of photo resist film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5440080A true JPS5440080A (en) | 1979-03-28 |
Family
ID=14447985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10700277A Pending JPS5440080A (en) | 1977-09-05 | 1977-09-05 | Forming method of photo resist film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5440080A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04100185U (en) * | 1991-02-01 | 1992-08-28 |
-
1977
- 1977-09-05 JP JP10700277A patent/JPS5440080A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04100185U (en) * | 1991-02-01 | 1992-08-28 |
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