JPS5283064A - Regist film forming method - Google Patents
Regist film forming methodInfo
- Publication number
- JPS5283064A JPS5283064A JP15916775A JP15916775A JPS5283064A JP S5283064 A JPS5283064 A JP S5283064A JP 15916775 A JP15916775 A JP 15916775A JP 15916775 A JP15916775 A JP 15916775A JP S5283064 A JPS5283064 A JP S5283064A
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- forming method
- regist
- regist film
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make etching patterns without using photo masks by applying printing on a resist film for etching thereby preventing exposure to light.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15916775A JPS5283064A (en) | 1975-12-29 | 1975-12-29 | Regist film forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15916775A JPS5283064A (en) | 1975-12-29 | 1975-12-29 | Regist film forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5283064A true JPS5283064A (en) | 1977-07-11 |
Family
ID=15687726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15916775A Pending JPS5283064A (en) | 1975-12-29 | 1975-12-29 | Regist film forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5283064A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876835A (en) * | 1981-10-31 | 1983-05-10 | Dainippon Ink & Chem Inc | Manufacture of patterned curable resin film having resist property |
-
1975
- 1975-12-29 JP JP15916775A patent/JPS5283064A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876835A (en) * | 1981-10-31 | 1983-05-10 | Dainippon Ink & Chem Inc | Manufacture of patterned curable resin film having resist property |
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