JPS5283064A - Regist film forming method - Google Patents

Regist film forming method

Info

Publication number
JPS5283064A
JPS5283064A JP15916775A JP15916775A JPS5283064A JP S5283064 A JPS5283064 A JP S5283064A JP 15916775 A JP15916775 A JP 15916775A JP 15916775 A JP15916775 A JP 15916775A JP S5283064 A JPS5283064 A JP S5283064A
Authority
JP
Japan
Prior art keywords
film forming
forming method
regist
regist film
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15916775A
Other languages
Japanese (ja)
Inventor
Koichi Yokosuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP15916775A priority Critical patent/JPS5283064A/en
Publication of JPS5283064A publication Critical patent/JPS5283064A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make etching patterns without using photo masks by applying printing on a resist film for etching thereby preventing exposure to light.
COPYRIGHT: (C)1977,JPO&Japio
JP15916775A 1975-12-29 1975-12-29 Regist film forming method Pending JPS5283064A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15916775A JPS5283064A (en) 1975-12-29 1975-12-29 Regist film forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15916775A JPS5283064A (en) 1975-12-29 1975-12-29 Regist film forming method

Publications (1)

Publication Number Publication Date
JPS5283064A true JPS5283064A (en) 1977-07-11

Family

ID=15687726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15916775A Pending JPS5283064A (en) 1975-12-29 1975-12-29 Regist film forming method

Country Status (1)

Country Link
JP (1) JPS5283064A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876835A (en) * 1981-10-31 1983-05-10 Dainippon Ink & Chem Inc Manufacture of patterned curable resin film having resist property

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876835A (en) * 1981-10-31 1983-05-10 Dainippon Ink & Chem Inc Manufacture of patterned curable resin film having resist property

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