JPS5366173A - Light exposure method - Google Patents
Light exposure methodInfo
- Publication number
- JPS5366173A JPS5366173A JP14201276A JP14201276A JPS5366173A JP S5366173 A JPS5366173 A JP S5366173A JP 14201276 A JP14201276 A JP 14201276A JP 14201276 A JP14201276 A JP 14201276A JP S5366173 A JPS5366173 A JP S5366173A
- Authority
- JP
- Japan
- Prior art keywords
- light exposure
- exposure method
- mask
- photo
- good quality
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To perform many-sided printing of a photo-image pattern of a good quality on a large-size photosensitive plate by using a mask pattern mask for light exposure.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14201276A JPS5366173A (en) | 1976-11-25 | 1976-11-25 | Light exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14201276A JPS5366173A (en) | 1976-11-25 | 1976-11-25 | Light exposure method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5366173A true JPS5366173A (en) | 1978-06-13 |
Family
ID=15305313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14201276A Pending JPS5366173A (en) | 1976-11-25 | 1976-11-25 | Light exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5366173A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673437A (en) * | 1979-11-20 | 1981-06-18 | Fujitsu Ltd | Far-ultraviolet light exposing method and device |
-
1976
- 1976-11-25 JP JP14201276A patent/JPS5366173A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673437A (en) * | 1979-11-20 | 1981-06-18 | Fujitsu Ltd | Far-ultraviolet light exposing method and device |
JPS6231490B2 (en) * | 1979-11-20 | 1987-07-08 | Fujitsu Ltd |
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