JPS5366173A - Light exposure method - Google Patents

Light exposure method

Info

Publication number
JPS5366173A
JPS5366173A JP14201276A JP14201276A JPS5366173A JP S5366173 A JPS5366173 A JP S5366173A JP 14201276 A JP14201276 A JP 14201276A JP 14201276 A JP14201276 A JP 14201276A JP S5366173 A JPS5366173 A JP S5366173A
Authority
JP
Japan
Prior art keywords
light exposure
exposure method
mask
photo
good quality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14201276A
Other languages
Japanese (ja)
Inventor
Eiji Yoshimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14201276A priority Critical patent/JPS5366173A/en
Publication of JPS5366173A publication Critical patent/JPS5366173A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To perform many-sided printing of a photo-image pattern of a good quality on a large-size photosensitive plate by using a mask pattern mask for light exposure.
COPYRIGHT: (C)1978,JPO&Japio
JP14201276A 1976-11-25 1976-11-25 Light exposure method Pending JPS5366173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14201276A JPS5366173A (en) 1976-11-25 1976-11-25 Light exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14201276A JPS5366173A (en) 1976-11-25 1976-11-25 Light exposure method

Publications (1)

Publication Number Publication Date
JPS5366173A true JPS5366173A (en) 1978-06-13

Family

ID=15305313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14201276A Pending JPS5366173A (en) 1976-11-25 1976-11-25 Light exposure method

Country Status (1)

Country Link
JP (1) JPS5366173A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673437A (en) * 1979-11-20 1981-06-18 Fujitsu Ltd Far-ultraviolet light exposing method and device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673437A (en) * 1979-11-20 1981-06-18 Fujitsu Ltd Far-ultraviolet light exposing method and device
JPS6231490B2 (en) * 1979-11-20 1987-07-08 Fujitsu Ltd

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