JPS5313880A - Fine patterning method - Google Patents

Fine patterning method

Info

Publication number
JPS5313880A
JPS5313880A JP8797476A JP8797476A JPS5313880A JP S5313880 A JPS5313880 A JP S5313880A JP 8797476 A JP8797476 A JP 8797476A JP 8797476 A JP8797476 A JP 8797476A JP S5313880 A JPS5313880 A JP S5313880A
Authority
JP
Japan
Prior art keywords
patterning method
fine patterning
patterns
fine
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8797476A
Other languages
Japanese (ja)
Other versions
JPS6053460B2 (en
Inventor
Haruo Urai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8797476A priority Critical patent/JPS6053460B2/en
Publication of JPS5313880A publication Critical patent/JPS5313880A/en
Publication of JPS6053460B2 publication Critical patent/JPS6053460B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To perform working of fine patterns easily by controlling pattern skirt through diagonal ion beam radiation to a regist mask thereby forming the patterns.
COPYRIGHT: (C)1978,JPO&Japio
JP8797476A 1976-07-23 1976-07-23 Fine pattern processing method Expired JPS6053460B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8797476A JPS6053460B2 (en) 1976-07-23 1976-07-23 Fine pattern processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8797476A JPS6053460B2 (en) 1976-07-23 1976-07-23 Fine pattern processing method

Publications (2)

Publication Number Publication Date
JPS5313880A true JPS5313880A (en) 1978-02-07
JPS6053460B2 JPS6053460B2 (en) 1985-11-26

Family

ID=13929799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8797476A Expired JPS6053460B2 (en) 1976-07-23 1976-07-23 Fine pattern processing method

Country Status (1)

Country Link
JP (1) JPS6053460B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146933A (en) * 1979-05-04 1980-11-15 Nec Corp Manufacturing of integrated element
CN107984399A (en) * 2017-11-22 2018-05-04 宁波江北清锐汽车零部件有限公司 The splicing method of auto parts and components shot-blasting machine

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6253915U (en) * 1985-09-20 1987-04-03

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146933A (en) * 1979-05-04 1980-11-15 Nec Corp Manufacturing of integrated element
JPS63946B2 (en) * 1979-05-04 1988-01-09 Nippon Electric Co
CN107984399A (en) * 2017-11-22 2018-05-04 宁波江北清锐汽车零部件有限公司 The splicing method of auto parts and components shot-blasting machine
CN107984399B (en) * 2017-11-22 2019-07-09 宁波江北清锐汽车零部件有限公司 The splicing method of auto parts and components shot-blasting machine

Also Published As

Publication number Publication date
JPS6053460B2 (en) 1985-11-26

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