JPS51147261A - Forming method of pattern - Google Patents
Forming method of patternInfo
- Publication number
- JPS51147261A JPS51147261A JP7159175A JP7159175A JPS51147261A JP S51147261 A JPS51147261 A JP S51147261A JP 7159175 A JP7159175 A JP 7159175A JP 7159175 A JP7159175 A JP 7159175A JP S51147261 A JPS51147261 A JP S51147261A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- forming method
- resist
- type resist
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To obtain the same pattern as a negative-type resist by cutting down the time of exposure against a resist when a positive-type resist is exposed to an electronic beam.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7159175A JPS51147261A (en) | 1975-06-13 | 1975-06-13 | Forming method of pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7159175A JPS51147261A (en) | 1975-06-13 | 1975-06-13 | Forming method of pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51147261A true JPS51147261A (en) | 1976-12-17 |
Family
ID=13465059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7159175A Pending JPS51147261A (en) | 1975-06-13 | 1975-06-13 | Forming method of pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51147261A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57162331A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Forming method for wiring pattern |
JPS5928336A (en) * | 1982-08-09 | 1984-02-15 | Nippon Telegr & Teleph Corp <Ntt> | Pattern forming method |
-
1975
- 1975-06-13 JP JP7159175A patent/JPS51147261A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57162331A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Forming method for wiring pattern |
JPS5928336A (en) * | 1982-08-09 | 1984-02-15 | Nippon Telegr & Teleph Corp <Ntt> | Pattern forming method |
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