JPS527096A - Pattern making method - Google Patents
Pattern making methodInfo
- Publication number
- JPS527096A JPS527096A JP8309375A JP8309375A JPS527096A JP S527096 A JPS527096 A JP S527096A JP 8309375 A JP8309375 A JP 8309375A JP 8309375 A JP8309375 A JP 8309375A JP S527096 A JPS527096 A JP S527096A
- Authority
- JP
- Japan
- Prior art keywords
- making method
- pattern making
- pattern
- baking
- post
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To provide a pattern making method,which can prevent a pattern from deforming during a process of post-baking in a usual resist pattern formation.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8309375A JPS527096A (en) | 1975-07-08 | 1975-07-08 | Pattern making method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8309375A JPS527096A (en) | 1975-07-08 | 1975-07-08 | Pattern making method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS527096A true JPS527096A (en) | 1977-01-19 |
JPS5540179B2 JPS5540179B2 (en) | 1980-10-16 |
Family
ID=13792554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8309375A Granted JPS527096A (en) | 1975-07-08 | 1975-07-08 | Pattern making method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS527096A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6019955A (en) * | 1983-07-01 | 1985-02-01 | ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Fuel injection pump for internal combustion engine |
-
1975
- 1975-07-08 JP JP8309375A patent/JPS527096A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6019955A (en) * | 1983-07-01 | 1985-02-01 | ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Fuel injection pump for internal combustion engine |
JPH0536632B2 (en) * | 1983-07-01 | 1993-05-31 | Bosch Gmbh Robert |
Also Published As
Publication number | Publication date |
---|---|
JPS5540179B2 (en) | 1980-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51136598A (en) | Production method of colloidital antymony oxide | |
JPS5230170A (en) | Method of photoetching | |
JPS527096A (en) | Pattern making method | |
JPS51134788A (en) | Method for manufacturing a polyester | |
JPS51139267A (en) | Photo-mask | |
JPS51126072A (en) | Pattern formation equipment | |
JPS521984A (en) | Process and apparatus for manufacturing a metal halide lamp | |
JPS51125356A (en) | Process for preparing 4-hydroxycyclopent -2-ene-1-one | |
JPS534477A (en) | Production of semiconductor device | |
JPS5237238A (en) | Manufacturing process for coil-heater | |
JPS5244571A (en) | Method of forming fine pattern | |
JPS51147596A (en) | Process for manufacturing modified polyester | |
JPS5213348A (en) | A method of producing a pattern on mirrors | |
JPS5234758A (en) | Process for the fabrication of a character plate | |
JPS51147190A (en) | Method of manufacturing of integurated circuit for lsi | |
JPS51133654A (en) | Process for making cam shaft | |
JPS51147261A (en) | Forming method of pattern | |
JPS5228268A (en) | Process for reproduction of minute relief pattern | |
JPS5210020A (en) | Method for manufacturing signal distributor | |
JPS5221692A (en) | Production method of e shape sleeve | |
JPS528834A (en) | Image forming process | |
JPS51116888A (en) | A method for shaping a nitrocellulose | |
JPS5239882A (en) | Method of making a bracket for a plowing pawl | |
JPS51140484A (en) | Method of etching wafer | |
JPS51151882A (en) | Method to produce chain |