JPS53977A - Preparation of fine pattern - Google Patents

Preparation of fine pattern

Info

Publication number
JPS53977A
JPS53977A JP7452276A JP7452276A JPS53977A JP S53977 A JPS53977 A JP S53977A JP 7452276 A JP7452276 A JP 7452276A JP 7452276 A JP7452276 A JP 7452276A JP S53977 A JPS53977 A JP S53977A
Authority
JP
Japan
Prior art keywords
fine pattern
preparation
radiation
prepare
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7452276A
Other languages
Japanese (ja)
Other versions
JPS5645292B2 (en
Inventor
Norikazu Tsumita
Hideki Nishida
Masaki Takahashi
Yutaka Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP7452276A priority Critical patent/JPS53977A/en
Publication of JPS53977A publication Critical patent/JPS53977A/en
Publication of JPS5645292B2 publication Critical patent/JPS5645292B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To prepare a fine pattern by carrying out ionic processing through use of a mask developed by the application of radiation to epoxidized polybutadiene.
COPYRIGHT: (C)1978,JPO&Japio
JP7452276A 1976-06-25 1976-06-25 Preparation of fine pattern Granted JPS53977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7452276A JPS53977A (en) 1976-06-25 1976-06-25 Preparation of fine pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7452276A JPS53977A (en) 1976-06-25 1976-06-25 Preparation of fine pattern

Publications (2)

Publication Number Publication Date
JPS53977A true JPS53977A (en) 1978-01-07
JPS5645292B2 JPS5645292B2 (en) 1981-10-26

Family

ID=13549727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7452276A Granted JPS53977A (en) 1976-06-25 1976-06-25 Preparation of fine pattern

Country Status (1)

Country Link
JP (1) JPS53977A (en)

Also Published As

Publication number Publication date
JPS5645292B2 (en) 1981-10-26

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