JPS5396671A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5396671A JPS5396671A JP1026477A JP1026477A JPS5396671A JP S5396671 A JPS5396671 A JP S5396671A JP 1026477 A JP1026477 A JP 1026477A JP 1026477 A JP1026477 A JP 1026477A JP S5396671 A JPS5396671 A JP S5396671A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- pattermformation
- reside
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To make the manufacture of semiconductor devices possible without fine pattermformation and mask matching, by causing the part under a metal visor to reside utilizing the phenomenon that no resist is exposed under it.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1026477A JPS5396671A (en) | 1977-02-03 | 1977-02-03 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1026477A JPS5396671A (en) | 1977-02-03 | 1977-02-03 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5396671A true JPS5396671A (en) | 1978-08-24 |
JPS5653228B2 JPS5653228B2 (en) | 1981-12-17 |
Family
ID=11745444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1026477A Granted JPS5396671A (en) | 1977-02-03 | 1977-02-03 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5396671A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56100482A (en) * | 1980-01-14 | 1981-08-12 | Matsushita Electric Ind Co Ltd | Manufacture of fet |
JPS5852880A (en) * | 1981-09-25 | 1983-03-29 | Oki Electric Ind Co Ltd | Manufacture of semiconductor element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5065174A (en) * | 1973-09-07 | 1975-06-02 |
-
1977
- 1977-02-03 JP JP1026477A patent/JPS5396671A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5065174A (en) * | 1973-09-07 | 1975-06-02 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56100482A (en) * | 1980-01-14 | 1981-08-12 | Matsushita Electric Ind Co Ltd | Manufacture of fet |
JPS5852880A (en) * | 1981-09-25 | 1983-03-29 | Oki Electric Ind Co Ltd | Manufacture of semiconductor element |
JPS6310905B2 (en) * | 1981-09-25 | 1988-03-10 | Oki Electric Ind Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5653228B2 (en) | 1981-12-17 |
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