JPS5396671A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5396671A
JPS5396671A JP1026477A JP1026477A JPS5396671A JP S5396671 A JPS5396671 A JP S5396671A JP 1026477 A JP1026477 A JP 1026477A JP 1026477 A JP1026477 A JP 1026477A JP S5396671 A JPS5396671 A JP S5396671A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
pattermformation
reside
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1026477A
Other languages
Japanese (ja)
Other versions
JPS5653228B2 (en
Inventor
Tomoyasu Kato
Takeshi Asao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1026477A priority Critical patent/JPS5396671A/en
Publication of JPS5396671A publication Critical patent/JPS5396671A/en
Publication of JPS5653228B2 publication Critical patent/JPS5653228B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To make the manufacture of semiconductor devices possible without fine pattermformation and mask matching, by causing the part under a metal visor to reside utilizing the phenomenon that no resist is exposed under it.
COPYRIGHT: (C)1978,JPO&Japio
JP1026477A 1977-02-03 1977-02-03 Manufacture of semiconductor device Granted JPS5396671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1026477A JPS5396671A (en) 1977-02-03 1977-02-03 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1026477A JPS5396671A (en) 1977-02-03 1977-02-03 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5396671A true JPS5396671A (en) 1978-08-24
JPS5653228B2 JPS5653228B2 (en) 1981-12-17

Family

ID=11745444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1026477A Granted JPS5396671A (en) 1977-02-03 1977-02-03 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5396671A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100482A (en) * 1980-01-14 1981-08-12 Matsushita Electric Ind Co Ltd Manufacture of fet
JPS5852880A (en) * 1981-09-25 1983-03-29 Oki Electric Ind Co Ltd Manufacture of semiconductor element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5065174A (en) * 1973-09-07 1975-06-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5065174A (en) * 1973-09-07 1975-06-02

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100482A (en) * 1980-01-14 1981-08-12 Matsushita Electric Ind Co Ltd Manufacture of fet
JPS5852880A (en) * 1981-09-25 1983-03-29 Oki Electric Ind Co Ltd Manufacture of semiconductor element
JPS6310905B2 (en) * 1981-09-25 1988-03-10 Oki Electric Ind Co Ltd

Also Published As

Publication number Publication date
JPS5653228B2 (en) 1981-12-17

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