JPS52117070A - Exposing mask for photo-etching - Google Patents

Exposing mask for photo-etching

Info

Publication number
JPS52117070A
JPS52117070A JP3356976A JP3356976A JPS52117070A JP S52117070 A JPS52117070 A JP S52117070A JP 3356976 A JP3356976 A JP 3356976A JP 3356976 A JP3356976 A JP 3356976A JP S52117070 A JPS52117070 A JP S52117070A
Authority
JP
Japan
Prior art keywords
photo
etching
exposing mask
mask
exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3356976A
Other languages
Japanese (ja)
Inventor
Akio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3356976A priority Critical patent/JPS52117070A/en
Publication of JPS52117070A publication Critical patent/JPS52117070A/en
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To prepare an exposing mask for fine processing by making the width of a mask two or more times larger than the diameter of a water.
COPYRIGHT: (C)1977,JPO&Japio
JP3356976A 1976-03-29 1976-03-29 Exposing mask for photo-etching Pending JPS52117070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3356976A JPS52117070A (en) 1976-03-29 1976-03-29 Exposing mask for photo-etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3356976A JPS52117070A (en) 1976-03-29 1976-03-29 Exposing mask for photo-etching

Publications (1)

Publication Number Publication Date
JPS52117070A true JPS52117070A (en) 1977-10-01

Family

ID=12390168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3356976A Pending JPS52117070A (en) 1976-03-29 1976-03-29 Exposing mask for photo-etching

Country Status (1)

Country Link
JP (1) JPS52117070A (en)

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