JPS52117070A - Exposing mask for photo-etching - Google Patents
Exposing mask for photo-etchingInfo
- Publication number
- JPS52117070A JPS52117070A JP3356976A JP3356976A JPS52117070A JP S52117070 A JPS52117070 A JP S52117070A JP 3356976 A JP3356976 A JP 3356976A JP 3356976 A JP3356976 A JP 3356976A JP S52117070 A JPS52117070 A JP S52117070A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- etching
- exposing mask
- mask
- exposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Projection-Type Copiers In General (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To prepare an exposing mask for fine processing by making the width of a mask two or more times larger than the diameter of a water.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3356976A JPS52117070A (en) | 1976-03-29 | 1976-03-29 | Exposing mask for photo-etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3356976A JPS52117070A (en) | 1976-03-29 | 1976-03-29 | Exposing mask for photo-etching |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117070A true JPS52117070A (en) | 1977-10-01 |
Family
ID=12390168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3356976A Pending JPS52117070A (en) | 1976-03-29 | 1976-03-29 | Exposing mask for photo-etching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117070A (en) |
-
1976
- 1976-03-29 JP JP3356976A patent/JPS52117070A/en active Pending
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