JPS51124380A - Photo mask - Google Patents
Photo maskInfo
- Publication number
- JPS51124380A JPS51124380A JP4932875A JP4932875A JPS51124380A JP S51124380 A JPS51124380 A JP S51124380A JP 4932875 A JP4932875 A JP 4932875A JP 4932875 A JP4932875 A JP 4932875A JP S51124380 A JPS51124380 A JP S51124380A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- photo mask
- working
- photo
- instance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE: In forming a working mask utilizing the contact print method, to improve the tight contact of a master mask and a copy mask material which becomes a working mask, for instance and to make a photo-resist exposure of high accuracy patterns possible.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4932875A JPS51124380A (en) | 1975-04-22 | 1975-04-22 | Photo mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4932875A JPS51124380A (en) | 1975-04-22 | 1975-04-22 | Photo mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51124380A true JPS51124380A (en) | 1976-10-29 |
JPS5759544B2 JPS5759544B2 (en) | 1982-12-15 |
Family
ID=12827908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4932875A Granted JPS51124380A (en) | 1975-04-22 | 1975-04-22 | Photo mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51124380A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562736A (en) * | 1978-11-01 | 1980-05-12 | Toshiba Corp | Mask material for preparation of semiconductor device |
-
1975
- 1975-04-22 JP JP4932875A patent/JPS51124380A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562736A (en) * | 1978-11-01 | 1980-05-12 | Toshiba Corp | Mask material for preparation of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5759544B2 (en) | 1982-12-15 |
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