JPS51124380A - Photo mask - Google Patents

Photo mask

Info

Publication number
JPS51124380A
JPS51124380A JP4932875A JP4932875A JPS51124380A JP S51124380 A JPS51124380 A JP S51124380A JP 4932875 A JP4932875 A JP 4932875A JP 4932875 A JP4932875 A JP 4932875A JP S51124380 A JPS51124380 A JP S51124380A
Authority
JP
Japan
Prior art keywords
mask
photo mask
working
photo
instance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4932875A
Other languages
Japanese (ja)
Other versions
JPS5759544B2 (en
Inventor
Kenji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4932875A priority Critical patent/JPS51124380A/en
Publication of JPS51124380A publication Critical patent/JPS51124380A/en
Publication of JPS5759544B2 publication Critical patent/JPS5759544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: In forming a working mask utilizing the contact print method, to improve the tight contact of a master mask and a copy mask material which becomes a working mask, for instance and to make a photo-resist exposure of high accuracy patterns possible.
COPYRIGHT: (C)1976,JPO&Japio
JP4932875A 1975-04-22 1975-04-22 Photo mask Granted JPS51124380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4932875A JPS51124380A (en) 1975-04-22 1975-04-22 Photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4932875A JPS51124380A (en) 1975-04-22 1975-04-22 Photo mask

Publications (2)

Publication Number Publication Date
JPS51124380A true JPS51124380A (en) 1976-10-29
JPS5759544B2 JPS5759544B2 (en) 1982-12-15

Family

ID=12827908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4932875A Granted JPS51124380A (en) 1975-04-22 1975-04-22 Photo mask

Country Status (1)

Country Link
JP (1) JPS51124380A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562736A (en) * 1978-11-01 1980-05-12 Toshiba Corp Mask material for preparation of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562736A (en) * 1978-11-01 1980-05-12 Toshiba Corp Mask material for preparation of semiconductor device

Also Published As

Publication number Publication date
JPS5759544B2 (en) 1982-12-15

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