JPS52156569A - Production of optical mask - Google Patents

Production of optical mask

Info

Publication number
JPS52156569A
JPS52156569A JP7343976A JP7343976A JPS52156569A JP S52156569 A JPS52156569 A JP S52156569A JP 7343976 A JP7343976 A JP 7343976A JP 7343976 A JP7343976 A JP 7343976A JP S52156569 A JPS52156569 A JP S52156569A
Authority
JP
Japan
Prior art keywords
production
optical mask
exposure
exposing
combination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7343976A
Other languages
Japanese (ja)
Other versions
JPS5855660B2 (en
Inventor
Teruo Iino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP51073439A priority Critical patent/JPS5855660B2/en
Publication of JPS52156569A publication Critical patent/JPS52156569A/en
Publication of JPS5855660B2 publication Critical patent/JPS5855660B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the exposure time at the production of hard masks by exposing a photo resist film with the combination of selective exposure and overall exposure.
COPYRIGHT: (C)1977,JPO&Japio
JP51073439A 1976-06-22 1976-06-22 Method for manufacturing optical masks Expired JPS5855660B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51073439A JPS5855660B2 (en) 1976-06-22 1976-06-22 Method for manufacturing optical masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51073439A JPS5855660B2 (en) 1976-06-22 1976-06-22 Method for manufacturing optical masks

Publications (2)

Publication Number Publication Date
JPS52156569A true JPS52156569A (en) 1977-12-27
JPS5855660B2 JPS5855660B2 (en) 1983-12-10

Family

ID=13518266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51073439A Expired JPS5855660B2 (en) 1976-06-22 1976-06-22 Method for manufacturing optical masks

Country Status (1)

Country Link
JP (1) JPS5855660B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62251748A (en) * 1986-04-25 1987-11-02 Hoya Corp Patter forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62251748A (en) * 1986-04-25 1987-11-02 Hoya Corp Patter forming method

Also Published As

Publication number Publication date
JPS5855660B2 (en) 1983-12-10

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