JPS5314570A - Production of photo mask - Google Patents

Production of photo mask

Info

Publication number
JPS5314570A
JPS5314570A JP8880476A JP8880476A JPS5314570A JP S5314570 A JPS5314570 A JP S5314570A JP 8880476 A JP8880476 A JP 8880476A JP 8880476 A JP8880476 A JP 8880476A JP S5314570 A JPS5314570 A JP S5314570A
Authority
JP
Japan
Prior art keywords
production
photo mask
photo
darkness
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8880476A
Other languages
Japanese (ja)
Other versions
JPS5915174B2 (en
Inventor
Nobuo Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP51088804A priority Critical patent/JPS5915174B2/en
Publication of JPS5314570A publication Critical patent/JPS5314570A/en
Publication of JPS5915174B2 publication Critical patent/JPS5915174B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To produce two kinds of photo masks reverse of light and darkness by using one kind of resist.
COPYRIGHT: (C)1978,JPO&Japio
JP51088804A 1976-07-26 1976-07-26 How to make a photomask Expired JPS5915174B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51088804A JPS5915174B2 (en) 1976-07-26 1976-07-26 How to make a photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51088804A JPS5915174B2 (en) 1976-07-26 1976-07-26 How to make a photomask

Publications (2)

Publication Number Publication Date
JPS5314570A true JPS5314570A (en) 1978-02-09
JPS5915174B2 JPS5915174B2 (en) 1984-04-07

Family

ID=13953055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51088804A Expired JPS5915174B2 (en) 1976-07-26 1976-07-26 How to make a photomask

Country Status (1)

Country Link
JP (1) JPS5915174B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2486716A1 (en) * 1980-07-11 1982-01-15 Philips Nv METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE
JPS5945443A (en) * 1982-08-25 1984-03-14 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Manufacture of chrome mask
US4640738A (en) * 1984-06-22 1987-02-03 International Business Machines Corporation Semiconductor contact protection

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2486716A1 (en) * 1980-07-11 1982-01-15 Philips Nv METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE
JPS5945443A (en) * 1982-08-25 1984-03-14 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Manufacture of chrome mask
JPH035573B2 (en) * 1982-08-25 1991-01-25 Intaanashonaru Bijinesu Mashiinzu Corp
US4640738A (en) * 1984-06-22 1987-02-03 International Business Machines Corporation Semiconductor contact protection

Also Published As

Publication number Publication date
JPS5915174B2 (en) 1984-04-07

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