JPS5330275A - Etching method of fine pattern - Google Patents

Etching method of fine pattern

Info

Publication number
JPS5330275A
JPS5330275A JP10363576A JP10363576A JPS5330275A JP S5330275 A JPS5330275 A JP S5330275A JP 10363576 A JP10363576 A JP 10363576A JP 10363576 A JP10363576 A JP 10363576A JP S5330275 A JPS5330275 A JP S5330275A
Authority
JP
Japan
Prior art keywords
etching method
fine pattern
pattern
etch
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10363576A
Other languages
Japanese (ja)
Inventor
Yoshiharu Mori
Etsuzo Terajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10363576A priority Critical patent/JPS5330275A/en
Publication of JPS5330275A publication Critical patent/JPS5330275A/en
Pending legal-status Critical Current

Links

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  • Weting (AREA)

Abstract

PURPOSE: To etch on a thin plate a pattern having a through hole of the same width in its upper and lower portions, by making the angle α about 1 to 8° in the isosceles trapezoid of the wider base than the top.
COPYRIGHT: (C)1978,JPO&Japio
JP10363576A 1976-09-01 1976-09-01 Etching method of fine pattern Pending JPS5330275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10363576A JPS5330275A (en) 1976-09-01 1976-09-01 Etching method of fine pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10363576A JPS5330275A (en) 1976-09-01 1976-09-01 Etching method of fine pattern

Publications (1)

Publication Number Publication Date
JPS5330275A true JPS5330275A (en) 1978-03-22

Family

ID=14359220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10363576A Pending JPS5330275A (en) 1976-09-01 1976-09-01 Etching method of fine pattern

Country Status (1)

Country Link
JP (1) JPS5330275A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103301A (en) * 1979-01-26 1980-08-07 Osteo Ag Lurricant aid for knee joint
JPS62204760A (en) * 1986-02-12 1987-09-09 テヒニシエ、ウニベルジテ−ト、カルル−マルクス−シユタツト Metal implant piece treated with ceramics
JPS63194250A (en) * 1987-02-07 1988-08-11 Hitachi Ltd Photoresist pattern and its formation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103301A (en) * 1979-01-26 1980-08-07 Osteo Ag Lurricant aid for knee joint
JPS62204760A (en) * 1986-02-12 1987-09-09 テヒニシエ、ウニベルジテ−ト、カルル−マルクス−シユタツト Metal implant piece treated with ceramics
JPS63194250A (en) * 1987-02-07 1988-08-11 Hitachi Ltd Photoresist pattern and its formation

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