JPS5330275A - Etching method of fine pattern - Google Patents
Etching method of fine patternInfo
- Publication number
- JPS5330275A JPS5330275A JP10363576A JP10363576A JPS5330275A JP S5330275 A JPS5330275 A JP S5330275A JP 10363576 A JP10363576 A JP 10363576A JP 10363576 A JP10363576 A JP 10363576A JP S5330275 A JPS5330275 A JP S5330275A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- fine pattern
- pattern
- etch
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To etch on a thin plate a pattern having a through hole of the same width in its upper and lower portions, by making the angle α about 1 to 8° in the isosceles trapezoid of the wider base than the top.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10363576A JPS5330275A (en) | 1976-09-01 | 1976-09-01 | Etching method of fine pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10363576A JPS5330275A (en) | 1976-09-01 | 1976-09-01 | Etching method of fine pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5330275A true JPS5330275A (en) | 1978-03-22 |
Family
ID=14359220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10363576A Pending JPS5330275A (en) | 1976-09-01 | 1976-09-01 | Etching method of fine pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5330275A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55103301A (en) * | 1979-01-26 | 1980-08-07 | Osteo Ag | Lurricant aid for knee joint |
JPS62204760A (en) * | 1986-02-12 | 1987-09-09 | テヒニシエ、ウニベルジテ−ト、カルル−マルクス−シユタツト | Metal implant piece treated with ceramics |
JPS63194250A (en) * | 1987-02-07 | 1988-08-11 | Hitachi Ltd | Photoresist pattern and its formation |
-
1976
- 1976-09-01 JP JP10363576A patent/JPS5330275A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55103301A (en) * | 1979-01-26 | 1980-08-07 | Osteo Ag | Lurricant aid for knee joint |
JPS62204760A (en) * | 1986-02-12 | 1987-09-09 | テヒニシエ、ウニベルジテ−ト、カルル−マルクス−シユタツト | Metal implant piece treated with ceramics |
JPS63194250A (en) * | 1987-02-07 | 1988-08-11 | Hitachi Ltd | Photoresist pattern and its formation |
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