JPS534475A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS534475A JPS534475A JP7781876A JP7781876A JPS534475A JP S534475 A JPS534475 A JP S534475A JP 7781876 A JP7781876 A JP 7781876A JP 7781876 A JP7781876 A JP 7781876A JP S534475 A JPS534475 A JP S534475A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- connection holes
- gates
- shape
- oxide films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To determine the shape and position of connection holes accurately by selectively removing the oxide films over poly-Si gates, then depositing PSG and freshly forming connection holes.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7781876A JPS534475A (en) | 1976-07-02 | 1976-07-02 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7781876A JPS534475A (en) | 1976-07-02 | 1976-07-02 | Etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS534475A true JPS534475A (en) | 1978-01-17 |
Family
ID=13644600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7781876A Pending JPS534475A (en) | 1976-07-02 | 1976-07-02 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS534475A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5976447A (en) * | 1982-10-26 | 1984-05-01 | Oki Electric Ind Co Ltd | Multi-layer wiring method |
EP0383610A2 (en) * | 1989-02-17 | 1990-08-22 | Matsushita Electronics Corporation | Manufacturing method of semiconductor device |
-
1976
- 1976-07-02 JP JP7781876A patent/JPS534475A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5976447A (en) * | 1982-10-26 | 1984-05-01 | Oki Electric Ind Co Ltd | Multi-layer wiring method |
JPH0542139B2 (en) * | 1982-10-26 | 1993-06-25 | Oki Electric Ind Co Ltd | |
EP0383610A2 (en) * | 1989-02-17 | 1990-08-22 | Matsushita Electronics Corporation | Manufacturing method of semiconductor device |
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