JPS534475A - Etching method - Google Patents

Etching method

Info

Publication number
JPS534475A
JPS534475A JP7781876A JP7781876A JPS534475A JP S534475 A JPS534475 A JP S534475A JP 7781876 A JP7781876 A JP 7781876A JP 7781876 A JP7781876 A JP 7781876A JP S534475 A JPS534475 A JP S534475A
Authority
JP
Japan
Prior art keywords
etching method
connection holes
gates
shape
oxide films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7781876A
Other languages
Japanese (ja)
Inventor
Hideo Sunami
Yasuo Wada
Nobuo Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7781876A priority Critical patent/JPS534475A/en
Publication of JPS534475A publication Critical patent/JPS534475A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To determine the shape and position of connection holes accurately by selectively removing the oxide films over poly-Si gates, then depositing PSG and freshly forming connection holes.
COPYRIGHT: (C)1978,JPO&Japio
JP7781876A 1976-07-02 1976-07-02 Etching method Pending JPS534475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7781876A JPS534475A (en) 1976-07-02 1976-07-02 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7781876A JPS534475A (en) 1976-07-02 1976-07-02 Etching method

Publications (1)

Publication Number Publication Date
JPS534475A true JPS534475A (en) 1978-01-17

Family

ID=13644600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7781876A Pending JPS534475A (en) 1976-07-02 1976-07-02 Etching method

Country Status (1)

Country Link
JP (1) JPS534475A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5976447A (en) * 1982-10-26 1984-05-01 Oki Electric Ind Co Ltd Multi-layer wiring method
EP0383610A2 (en) * 1989-02-17 1990-08-22 Matsushita Electronics Corporation Manufacturing method of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5976447A (en) * 1982-10-26 1984-05-01 Oki Electric Ind Co Ltd Multi-layer wiring method
JPH0542139B2 (en) * 1982-10-26 1993-06-25 Oki Electric Ind Co Ltd
EP0383610A2 (en) * 1989-02-17 1990-08-22 Matsushita Electronics Corporation Manufacturing method of semiconductor device

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