JPS52127768A - Spatter etching method - Google Patents
Spatter etching methodInfo
- Publication number
- JPS52127768A JPS52127768A JP4461376A JP4461376A JPS52127768A JP S52127768 A JPS52127768 A JP S52127768A JP 4461376 A JP4461376 A JP 4461376A JP 4461376 A JP4461376 A JP 4461376A JP S52127768 A JPS52127768 A JP S52127768A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- spatter etching
- spatter
- abosrbing
- substane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To make the ratio of the etched speed of SiO2 to Si large by forming MoF3, arranging the substane abosrbing F such as Mo, etc., close by the Si basic plate, and making the spatter etching.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4461376A JPS5946094B2 (en) | 1976-04-19 | 1976-04-19 | Sputter etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4461376A JPS5946094B2 (en) | 1976-04-19 | 1976-04-19 | Sputter etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52127768A true JPS52127768A (en) | 1977-10-26 |
JPS5946094B2 JPS5946094B2 (en) | 1984-11-10 |
Family
ID=12696283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4461376A Expired JPS5946094B2 (en) | 1976-04-19 | 1976-04-19 | Sputter etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5946094B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111617744A (en) * | 2020-06-09 | 2020-09-04 | 周建文 | Fe-MOFs-based magnetic porous carbon adsorption material and preparation method thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01113497U (en) * | 1988-01-26 | 1989-07-31 |
-
1976
- 1976-04-19 JP JP4461376A patent/JPS5946094B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111617744A (en) * | 2020-06-09 | 2020-09-04 | 周建文 | Fe-MOFs-based magnetic porous carbon adsorption material and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS5946094B2 (en) | 1984-11-10 |
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