JPS5665142A - Manufacture of electrophotographic receptor - Google Patents
Manufacture of electrophotographic receptorInfo
- Publication number
- JPS5665142A JPS5665142A JP14162479A JP14162479A JPS5665142A JP S5665142 A JPS5665142 A JP S5665142A JP 14162479 A JP14162479 A JP 14162479A JP 14162479 A JP14162479 A JP 14162479A JP S5665142 A JPS5665142 A JP S5665142A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- silicon
- electrically conductive
- silane
- material based
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain high dark specific resistance and high photoconductivity by using an amorphous material based on carbon and silicon.
CONSTITUTION: Predetermined gases are introduced into a vacuum chamber system to generate discharge phenomenon, and the introduced gases are decomposed with the discharge energy. By this glow discharge decomposition silane or a silane deriv. is reacted with a gas contg. carbon and fluorine such as CF4 gas to form photoconductive layer 204 made of amorphous material based on carbon and silicon. Electrically conductive support 201 is composed of support 202 and electrically conductive layer 203.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14162479A JPS5665142A (en) | 1979-11-01 | 1979-11-01 | Manufacture of electrophotographic receptor |
US06/202,201 US4361638A (en) | 1979-10-30 | 1980-10-30 | Electrophotographic element with alpha -Si and C material doped with H and F and process for producing the same |
DE19803040972 DE3040972A1 (en) | 1979-10-30 | 1980-10-30 | ELECTROPHOTOGRAPHIC LIGHT SENSITIVE MATERIAL AND METHOD FOR THE PRODUCTION THEREOF |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14162479A JPS5665142A (en) | 1979-11-01 | 1979-11-01 | Manufacture of electrophotographic receptor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5665142A true JPS5665142A (en) | 1981-06-02 |
JPS6161384B2 JPS6161384B2 (en) | 1986-12-25 |
Family
ID=15296359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14162479A Granted JPS5665142A (en) | 1979-10-30 | 1979-11-01 | Manufacture of electrophotographic receptor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5665142A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS593018A (en) * | 1982-06-25 | 1984-01-09 | Hitachi Ltd | Manufacture of silicon-base film by plasma deposition |
JPS5986053A (en) * | 1982-11-09 | 1984-05-18 | Seiko Epson Corp | Photosensitive drum |
JPS59127647A (en) * | 1983-01-11 | 1984-07-23 | Mitsui Toatsu Chem Inc | Preparation of amorphous membrane |
JPS59179151A (en) * | 1983-03-30 | 1984-10-11 | Mitsui Toatsu Chem Inc | Production of amorphous thin film |
JPS61201257A (en) * | 1985-03-04 | 1986-09-05 | Matsushita Electric Ind Co Ltd | Photoconductor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5325366A (en) * | 1976-08-23 | 1978-03-09 | Hitachi Ltd | Plasma treating method and apparat us |
-
1979
- 1979-11-01 JP JP14162479A patent/JPS5665142A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5325366A (en) * | 1976-08-23 | 1978-03-09 | Hitachi Ltd | Plasma treating method and apparat us |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS593018A (en) * | 1982-06-25 | 1984-01-09 | Hitachi Ltd | Manufacture of silicon-base film by plasma deposition |
JPS5986053A (en) * | 1982-11-09 | 1984-05-18 | Seiko Epson Corp | Photosensitive drum |
JPS59127647A (en) * | 1983-01-11 | 1984-07-23 | Mitsui Toatsu Chem Inc | Preparation of amorphous membrane |
JPS59179151A (en) * | 1983-03-30 | 1984-10-11 | Mitsui Toatsu Chem Inc | Production of amorphous thin film |
JPS61201257A (en) * | 1985-03-04 | 1986-09-05 | Matsushita Electric Ind Co Ltd | Photoconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS6161384B2 (en) | 1986-12-25 |
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