JPS5225566A - Semiconductor manufacturing apparatus - Google Patents
Semiconductor manufacturing apparatusInfo
- Publication number
- JPS5225566A JPS5225566A JP10117475A JP10117475A JPS5225566A JP S5225566 A JPS5225566 A JP S5225566A JP 10117475 A JP10117475 A JP 10117475A JP 10117475 A JP10117475 A JP 10117475A JP S5225566 A JPS5225566 A JP S5225566A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing apparatus
- semiconductor manufacturing
- constituting
- seal
- perform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To perform the liquid phase epitaxial growth with excellent reproducibility, by means of constituting the structure which can seal the reaction tube with the fitting ball joint.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10117475A JPS5225566A (en) | 1975-08-22 | 1975-08-22 | Semiconductor manufacturing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10117475A JPS5225566A (en) | 1975-08-22 | 1975-08-22 | Semiconductor manufacturing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5225566A true JPS5225566A (en) | 1977-02-25 |
JPS5428262B2 JPS5428262B2 (en) | 1979-09-14 |
Family
ID=14293633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10117475A Granted JPS5225566A (en) | 1975-08-22 | 1975-08-22 | Semiconductor manufacturing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5225566A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5584134A (en) * | 1978-12-21 | 1980-06-25 | Matsushita Electric Ind Co Ltd | Duster of vacuum cleaner |
JPS5584133A (en) * | 1978-12-21 | 1980-06-25 | Matsushita Electric Ind Co Ltd | Duster of vacuum cleaner |
-
1975
- 1975-08-22 JP JP10117475A patent/JPS5225566A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5428262B2 (en) | 1979-09-14 |
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