JPS5256855A - Liquid phase epitaxial device - Google Patents

Liquid phase epitaxial device

Info

Publication number
JPS5256855A
JPS5256855A JP13267075A JP13267075A JPS5256855A JP S5256855 A JPS5256855 A JP S5256855A JP 13267075 A JP13267075 A JP 13267075A JP 13267075 A JP13267075 A JP 13267075A JP S5256855 A JPS5256855 A JP S5256855A
Authority
JP
Japan
Prior art keywords
liquid phase
phase epitaxial
epitaxial device
solution
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13267075A
Other languages
Japanese (ja)
Inventor
Toshiyuki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP13267075A priority Critical patent/JPS5256855A/en
Publication of JPS5256855A publication Critical patent/JPS5256855A/en
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Lasers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To make it possible to select sequentially different type solution with covering substrate by solution constantly by the combination of vessel which contains solution and substrate supporter which have specified structure.
COPYRIGHT: (C)1977,JPO&Japio
JP13267075A 1975-11-05 1975-11-05 Liquid phase epitaxial device Pending JPS5256855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13267075A JPS5256855A (en) 1975-11-05 1975-11-05 Liquid phase epitaxial device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13267075A JPS5256855A (en) 1975-11-05 1975-11-05 Liquid phase epitaxial device

Publications (1)

Publication Number Publication Date
JPS5256855A true JPS5256855A (en) 1977-05-10

Family

ID=15086741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13267075A Pending JPS5256855A (en) 1975-11-05 1975-11-05 Liquid phase epitaxial device

Country Status (1)

Country Link
JP (1) JPS5256855A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397260A (en) * 1980-04-23 1983-08-09 U.S. Philips Corporation Boat for the epitaxial growth of several layers from the liquid phase

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397260A (en) * 1980-04-23 1983-08-09 U.S. Philips Corporation Boat for the epitaxial growth of several layers from the liquid phase

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