JPS5256855A - Liquid phase epitaxial device - Google Patents
Liquid phase epitaxial deviceInfo
- Publication number
- JPS5256855A JPS5256855A JP13267075A JP13267075A JPS5256855A JP S5256855 A JPS5256855 A JP S5256855A JP 13267075 A JP13267075 A JP 13267075A JP 13267075 A JP13267075 A JP 13267075A JP S5256855 A JPS5256855 A JP S5256855A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- phase epitaxial
- epitaxial device
- solution
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Lasers (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To make it possible to select sequentially different type solution with covering substrate by solution constantly by the combination of vessel which contains solution and substrate supporter which have specified structure.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13267075A JPS5256855A (en) | 1975-11-05 | 1975-11-05 | Liquid phase epitaxial device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13267075A JPS5256855A (en) | 1975-11-05 | 1975-11-05 | Liquid phase epitaxial device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5256855A true JPS5256855A (en) | 1977-05-10 |
Family
ID=15086741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13267075A Pending JPS5256855A (en) | 1975-11-05 | 1975-11-05 | Liquid phase epitaxial device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5256855A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4397260A (en) * | 1980-04-23 | 1983-08-09 | U.S. Philips Corporation | Boat for the epitaxial growth of several layers from the liquid phase |
-
1975
- 1975-11-05 JP JP13267075A patent/JPS5256855A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4397260A (en) * | 1980-04-23 | 1983-08-09 | U.S. Philips Corporation | Boat for the epitaxial growth of several layers from the liquid phase |
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