JPS6057125U - Semiconductor vapor phase growth equipment - Google Patents
Semiconductor vapor phase growth equipmentInfo
- Publication number
- JPS6057125U JPS6057125U JP14881583U JP14881583U JPS6057125U JP S6057125 U JPS6057125 U JP S6057125U JP 14881583 U JP14881583 U JP 14881583U JP 14881583 U JP14881583 U JP 14881583U JP S6057125 U JPS6057125 U JP S6057125U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- tube
- semiconductor vapor
- growth equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は本考案−実施例のそれぞれ異なった
状態にあるものを表わす要部切断側面図である。
図に於いて、１は反応管、ＩＡはガス置換用送気管、Ｉ
Ｂはガス置換用排気管、２は補助管、２Ａはくびれ部分
、３は蓋体、３Ａは排気管、４は′基板である。FIGS. 1 and 2 are cross-sectional side views of essential parts showing different states of the present invention-embodiment, respectively. In the figure, 1 is a reaction tube, IA is a gas replacement air pipe, I
B is an exhaust pipe for gas replacement, 2 is an auxiliary pipe, 2A is a constriction, 3 is a lid, 3A is an exhaust pipe, and 4 is a substrate.
Claims (1)
設された反応管と、前記搬送ガスを置換する為の管に対
向し得るくびれ部分が設けられ且つ前記反応管に挿脱さ
れる補助管とを備えてなることを特徴とする半導体気相
成長装置。A reaction tube is provided with a tube for displacing the carrier gas on the side surface of the exhaust tube, and a constricted portion that can face the tube for displacing the carrier gas and is inserted into and removed from the reaction tube. A semiconductor vapor phase growth apparatus characterized by comprising: an auxiliary tube in which
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14881583U JPS6057125U (en) | 1983-09-28 | 1983-09-28 | Semiconductor vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14881583U JPS6057125U (en) | 1983-09-28 | 1983-09-28 | Semiconductor vapor phase growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6057125U true JPS6057125U (en) | 1985-04-20 |
Family
ID=30330519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14881583U Pending JPS6057125U (en) | 1983-09-28 | 1983-09-28 | Semiconductor vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057125U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4833150A (en) * | 1971-08-28 | 1973-05-08 | ||
| JPS52120682A (en) * | 1976-04-02 | 1977-10-11 | Fujitsu Ltd | Gas phase growth method |
-
1983
- 1983-09-28 JP JP14881583U patent/JPS6057125U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4833150A (en) * | 1971-08-28 | 1973-05-08 | ||
| JPS52120682A (en) * | 1976-04-02 | 1977-10-11 | Fujitsu Ltd | Gas phase growth method |
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