JPS5991728U - Semiconductor substrate holding jig - Google Patents
Semiconductor substrate holding jigInfo
- Publication number
- JPS5991728U JPS5991728U JP18814782U JP18814782U JPS5991728U JP S5991728 U JPS5991728 U JP S5991728U JP 18814782 U JP18814782 U JP 18814782U JP 18814782 U JP18814782 U JP 18814782U JP S5991728 U JPS5991728 U JP S5991728U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- holding jig
- substrate holding
- abstract
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
６ 第１図はボートの平面図、第２図は従来のボー
３ トにウェハーを設置したときの断面図、第３図は
−本考案によるボートにウェハーを設置したときの断面
図、である。
なお図において、１・・・・・・半導体基板保持治具、
２・・・・・・反応管、３・・・・・・半導体基板、で
ある。6 Figure 1 is a plan view of the boat, Figure 2 is a cross-sectional view of a conventional boat with wafers installed, and Figure 3 is a cross-sectional view of a wafer installed in a boat according to the present invention. . In the figure, 1... semiconductor substrate holding jig,
2...Reaction tube, 3...Semiconductor substrate.
Claims (1)
保持治具に於て、半導体基板を保持すイ溝を鉛直方向に
対し斜めに切ったことを特徴とづる半導体基板の保持治
具。A single conductor substrate holding jig used in a process using a reduced pressure vapor phase growth apparatus, characterized in that a groove for holding the semiconductor substrate is cut diagonally with respect to the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18814782U JPS5991728U (en) | 1982-12-13 | 1982-12-13 | Semiconductor substrate holding jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18814782U JPS5991728U (en) | 1982-12-13 | 1982-12-13 | Semiconductor substrate holding jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5991728U true JPS5991728U (en) | 1984-06-21 |
Family
ID=30405957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18814782U Pending JPS5991728U (en) | 1982-12-13 | 1982-12-13 | Semiconductor substrate holding jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5991728U (en) |
-
1982
- 1982-12-13 JP JP18814782U patent/JPS5991728U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5991728U (en) | Semiconductor substrate holding jig | |
| JPS60174240U (en) | heat treatment boat | |
| JPS6035536U (en) | Reduced pressure vapor phase growth equipment | |
| JPS60167332U (en) | board boat | |
| JPS59117138U (en) | semiconductor manufacturing equipment | |
| JPS60100748U (en) | Photoresist coating equipment | |
| JPS5895634U (en) | Annealing equipment | |
| JPS6016535U (en) | Vapor phase growth equipment | |
| JPS5812940U (en) | Susceptor for vapor phase growth equipment | |
| JPS59159941U (en) | Semiconductor device manufacturing equipment | |
| JPS6057125U (en) | Semiconductor vapor phase growth equipment | |
| JPS5939160U (en) | polishing jig | |
| JPS5916140U (en) | Carrier for semiconductor wafers | |
| JPS58114039U (en) | Semiconductor manufacturing jig | |
| JPS60130633U (en) | Vacuum processing equipment | |
| JPS59103436U (en) | Boat for semiconductor wafers | |
| JPS60117857U (en) | Wafer holder for vapor deposition machine | |
| JPS6096826U (en) | semiconductor equipment | |
| JPS6088540U (en) | Etching device | |
| JPS59182932U (en) | Wafer transfer device | |
| JPS59180424U (en) | Jig for semiconductor substrate | |
| JPS6072211U (en) | Semiconductor wafer scribing equipment | |
| JPS59158330U (en) | Wafer cassette jig support device | |
| JPH01161334U (en) | ||
| JPS5961531U (en) | Liquid phase epitaxial growth equipment |