JPS59103436U - Boat for semiconductor wafers - Google Patents
Boat for semiconductor wafersInfo
- Publication number
- JPS59103436U JPS59103436U JP20161782U JP20161782U JPS59103436U JP S59103436 U JPS59103436 U JP S59103436U JP 20161782 U JP20161782 U JP 20161782U JP 20161782 U JP20161782 U JP 20161782U JP S59103436 U JPS59103436 U JP S59103436U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- semiconductor wafers
- semiconductor wafer
- wafer boat
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は半導体ウェハへの不純物拡散方法を示す構成図
、第２図は従来の半導体ウェハ用ボートの平面図、第３
図は同正面図、第４図はこの考案の一実施例に係る半導
体ウェハ用ボートの平面図、第５図は同正面図、第６図
はこの考案の他の実施例に係る半導体ウェハ用ボートの
平面図、第７図は同正面図である。
１１・・・半導体ウェハ用ボート、１２・・・溝、１３
・・・石英部材、１４・・・炭化ケイ素棒。
：
第６０図
３
、ｊ３
川
第１図
ヒョ」Figure 1 is a block diagram showing a method for diffusing impurities into semiconductor wafers, Figure 2 is a plan view of a conventional semiconductor wafer boat, and Figure 3 is a diagram showing a method for diffusing impurities into semiconductor wafers.
4 is a plan view of a semiconductor wafer boat according to an embodiment of this invention, FIG. 5 is a front view of the same, and FIG. 6 is a plan view of a semiconductor wafer boat according to another embodiment of this invention. A plan view of the boat, and FIG. 7 is a front view thereof. 11... Semiconductor wafer boat, 12... Groove, 13
...Quartz member, 14...Silicon carbide rod. : Figure 60 3, j3 River Figure 1 Hyo"
Claims (1)
ボートにおいて、内部に炭化ケイ素部材を封入した石英
部材により形成されたことを特徴とする半導体ウェハ用
ボート。A semiconductor wafer boat used in a semiconductor wafer heat treatment process, characterized in that it is formed of a quartz member with a silicon carbide member sealed inside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20161782U JPS59103436U (en) | 1982-12-27 | 1982-12-27 | Boat for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20161782U JPS59103436U (en) | 1982-12-27 | 1982-12-27 | Boat for semiconductor wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59103436U true JPS59103436U (en) | 1984-07-12 |
Family
ID=30427111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20161782U Pending JPS59103436U (en) | 1982-12-27 | 1982-12-27 | Boat for semiconductor wafers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59103436U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62181534U (en) * | 1986-05-09 | 1987-11-18 |
-
1982
- 1982-12-27 JP JP20161782U patent/JPS59103436U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62181534U (en) * | 1986-05-09 | 1987-11-18 |
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