JPS5866638U - diffusion furnace - Google Patents
diffusion furnaceInfo
- Publication number
- JPS5866638U JPS5866638U JP16215481U JP16215481U JPS5866638U JP S5866638 U JPS5866638 U JP S5866638U JP 16215481 U JP16215481 U JP 16215481U JP 16215481 U JP16215481 U JP 16215481U JP S5866638 U JPS5866638 U JP S5866638U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion furnace
- abstract
- quartz tube
- insulating material
- covered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の拡散炉に石英管が取付けられた状態の断
面図であり、第２図は本考案の一実施例［の断面図であ
る。
尚、図において、１・・・拡散炉筐体、２・・・ヒータ
ー、３・・・均熱管、４・・・石英管、５・・・断熱材
、６・・・カバー、である。
７／FIG. 1 is a sectional view of a conventional diffusion furnace with a quartz tube attached, and FIG. 2 is a sectional view of an embodiment of the present invention. In the figure, 1... Diffusion furnace housing, 2... Heater, 3... Soaking tube, 4... Quartz tube, 5... Heat insulating material, 6... Cover. 7/
Claims (1)
部を断熱材にて被覆し、熱放散を防止した事を特徴とす
る拡散炉。A diffusion furnace for diffusing semiconductor wafers, characterized in that the exposed portion of a quartz tube is covered with a heat insulating material to prevent heat dissipation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16215481U JPS5866638U (en) | 1981-10-29 | 1981-10-29 | diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16215481U JPS5866638U (en) | 1981-10-29 | 1981-10-29 | diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5866638U true JPS5866638U (en) | 1983-05-06 |
Family
ID=29954487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16215481U Pending JPS5866638U (en) | 1981-10-29 | 1981-10-29 | diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5866638U (en) |
-
1981
- 1981-10-29 JP JP16215481U patent/JPS5866638U/en active Pending
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