JPS58184841U - Wafer transfer device - Google Patents

Wafer transfer device

Info

Publication number
JPS58184841U
JPS58184841U JP8239882U JP8239882U JPS58184841U JP S58184841 U JPS58184841 U JP S58184841U JP 8239882 U JP8239882 U JP 8239882U JP 8239882 U JP8239882 U JP 8239882U JP S58184841 U JPS58184841 U JP S58184841U
Authority
JP
Japan
Prior art keywords
wafer
passage hole
electrode
light passage
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8239882U
Other languages
Japanese (ja)
Other versions
JPS6214693Y2 (en
Inventor
多田　啓司
勝義 工藤
福原　秀倶
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP8239882U priority Critical patent/JPS58184841U/en
Publication of JPS58184841U publication Critical patent/JPS58184841U/en
Application granted granted Critical
Publication of JPS6214693Y2 publication Critical patent/JPS6214693Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、第２図は、本考案の一実施例を説明するもので
、第１図は、本考案によるウェハー搬送装置を適用した
半導体製造装置の部分縦断面図、第２図は、第１図のＡ
−Ａ視部分平面図である。 １０・・・・・・処理室、１１・・・電極、１２ａ、１
２ｂ・・・・・・光通過孔、１４・・・・・・発光素子
：、１５・・・・・・受光素子、１６・・・・・・予備
室、１７・・・・・・アーム、１８・・・・・・掴み装
置。1 and 2 are for explaining one embodiment of the present invention. FIG. 1 is a partial longitudinal cross-sectional view of a semiconductor manufacturing apparatus to which a wafer transfer device according to the present invention is applied, and FIG. A in Figure 1
- It is a partial plan view seen from A. 10... Processing chamber, 11... Electrode, 12a, 1
2b...Light passing hole, 14...Light emitting element:, 15...Light receiving element, 16...Preliminary chamber, 17...Arm , 18... Grasping device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウェーハ載置位置に光通過孔が穿設された電極が回動可
能に内設され、前記光通過孔と同軸に発光素子と受光素
子とが設けられた処理室と、該処理室に具設された予備
室との間でウェーハを掴み搬送する装置において、前記
ウエーノ１掴み装置に、ウェーハ掴み装置が前記電極の
ウェーハ載置位置に到達した時点で電極の前記光通過孔
と対向する１うに光通過孔を穿設したことを特徴とする
ウェーハ搬送装置。A processing chamber in which an electrode with a light passage hole bored at a wafer placement position is rotatably installed therein, and a light emitting element and a light receiving element are provided coaxially with the light passage hole; In the apparatus for gripping and transporting wafers to and from a preparatory chamber, the wafer 1 gripping device is provided with a wafer 1 that faces the light passage hole of the electrode when the wafer gripping device reaches the wafer placement position of the electrode. A wafer transfer device characterized by having a light passage hole.
JP8239882U 1982-06-04 1982-06-04 Wafer transfer device Granted JPS58184841U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (en) 1982-06-04 1982-06-04 Wafer transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (en) 1982-06-04 1982-06-04 Wafer transfer device

Publications (2)

Publication Number Publication Date
JPS58184841U true JPS58184841U (en) 1983-12-08
JPS6214693Y2 JPS6214693Y2 (en) 1987-04-15

Family

ID=30091465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239882U Granted JPS58184841U (en) 1982-06-04 1982-06-04 Wafer transfer device

Country Status (1)

Country Link
JP (1) JPS58184841U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425151A (en) * 1990-05-21 1992-01-28 Canon Inc Thin plate carrying device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104569A (en) * 1973-02-07 1974-10-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104569A (en) * 1973-02-07 1974-10-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425151A (en) * 1990-05-21 1992-01-28 Canon Inc Thin plate carrying device

Also Published As

Publication number Publication date
JPS6214693Y2 (en) 1987-04-15

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