JPS6049636U - Thin gripping device - Google Patents
Thin gripping deviceInfo
- Publication number
- JPS6049636U JPS6049636U JP14090183U JP14090183U JPS6049636U JP S6049636 U JPS6049636 U JP S6049636U JP 14090183 U JP14090183 U JP 14090183U JP 14090183 U JP14090183 U JP 14090183U JP S6049636 U JPS6049636 U JP S6049636U
- Authority
- JP
- Japan
- Prior art keywords
- gripping device
- thin
- claws
- thin gripping
- thin pieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案薄片把持装置の一実施例を示す一部切欠
正面図、第２図は同じくその一部切欠側面図、第３図ａ
、 ｂ、 ｃはその動作説明図、第４図は本考案の他の
実施例を示す要部正面図である。
１・・・マスク基板、２・・・処理槽、３・・・固定支
持台、４・・・腕、５・・・爪、６，９・・・モータ、
７，１０・・・ねじ棒、１１・・・薄片把持装置本体、
１４，１４ａ＝ １５，１５ａ・・・凹部、１７・・
・ウェハ。Fig. 1 is a partially cutaway front view showing an embodiment of the thin piece gripping device of the present invention, Fig. 2 is a partially cutaway side view thereof, and Fig. 3a.
, b, and c are explanatory diagrams of the operation thereof, and FIG. 4 is a front view of main parts showing another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Mask substrate, 2... Processing tank, 3... Fixed support base, 4... Arm, 5... Claw, 6, 9... Motor,
7, 10... Threaded rod, 11... Thin piece gripping device main body,
14, 14a = 15, 15a... recess, 17...
・Wafer.
Claims (1)
左右一対の腕の端部に爪を設けてマスク基板並びにシリ
コンウェハ等の薄片を把持する機構において、爪に大き
さの異なる薄片の位置に合わせて、その対角線上の突部
に係合する凹部を複数個設けたことを特徴とする薄片把
持装置。In a mechanism that grips thin pieces such as mask substrates and silicon wafers by providing claws at the ends of a pair of left and right arms that can be moved vertically and inwardly and outwardly by a drive device, the claws are used to position thin pieces of different sizes. A thin piece gripping device characterized in that a plurality of recesses are provided to engage with the diagonal projections.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14090183U JPS6049636U (en) | 1983-09-13 | 1983-09-13 | Thin gripping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14090183U JPS6049636U (en) | 1983-09-13 | 1983-09-13 | Thin gripping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6049636U true JPS6049636U (en) | 1985-04-08 |
| JPS633157Y2 JPS633157Y2 (en) | 1988-01-26 |
Family
ID=30315304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14090183U Granted JPS6049636U (en) | 1983-09-13 | 1983-09-13 | Thin gripping device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6049636U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05386U (en) * | 1991-06-17 | 1993-01-08 | 株式会社小松製作所 | Robot hand device |
-
1983
- 1983-09-13 JP JP14090183U patent/JPS6049636U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05386U (en) * | 1991-06-17 | 1993-01-08 | 株式会社小松製作所 | Robot hand device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS633157Y2 (en) | 1988-01-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6049636U (en) | Thin gripping device | |
| JPS58138340U (en) | Carrier for cleaning and etching wafers | |
| JPS6452240U (en) | ||
| JPH0325903Y2 (en) | ||
| JPS59195741U (en) | Wafer transfer device | |
| JPS5880193U (en) | Grasp mechanism | |
| JPS59103457U (en) | Glass substrate for thin film semiconductor devices | |
| JPS58184841U (en) | Wafer transfer device | |
| JPH0412647U (en) | ||
| JPS6064926U (en) | Wafer transfer device | |
| JPS6135782U (en) | Hand part of silicon wafer holding robot | |
| JPS6334548A (en) | Substrate for photomask | |
| JPS5927060U (en) | glass cleaning tool | |
| JPS58114042U (en) | Silicon wafer cleaning equipment | |
| JPS5858340U (en) | Semiconductor wafer scriber | |
| JPS5868029U (en) | Semiconductor wafer carrier transport handle | |
| JPS59183389U (en) | Robot gripping device | |
| JPS58163298U (en) | Silicon wafers with portraits, paintings, etc. | |
| JPS5936246U (en) | Furnace elevator boat receiving arm | |
| JPS6135748U (en) | Tweezers for semiconductor wafers | |
| JPS6052625U (en) | Wafer transfer device | |
| JPS59180424U (en) | Jig for semiconductor substrate | |
| JPS5950695U (en) | hand rotation device | |
| JPS59103438U (en) | Mask handling jig | |
| JPH04123542U (en) | Wafer handling jig |