JPS60169838U - semiconductor manufacturing equipment - Google Patents

semiconductor manufacturing equipment

Info

Publication number
JPS60169838U
JPS60169838U JP5767084U JP5767084U JPS60169838U JP S60169838 U JPS60169838 U JP S60169838U JP 5767084 U JP5767084 U JP 5767084U JP 5767084 U JP5767084 U JP 5767084U JP S60169838 U JPS60169838 U JP S60169838U
Authority
JP
Japan
Prior art keywords
wafer
semiconductor manufacturing
manufacturing equipment
chuck
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5767084U
Other languages
Japanese (ja)
Inventor
山本　喜一朗
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP5767084U priority Critical patent/JPS60169838U/en
Publication of JPS60169838U publication Critical patent/JPS60169838U/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例の半導体製造装置の平面図
である。第２図および第３図はこの考案の先行技術の半
導体製造装置の平面図および断面図である。FIG. 1 is a plan view of a semiconductor manufacturing apparatus according to an embodiment of this invention. 2 and 3 are a plan view and a sectional view of a prior art semiconductor manufacturing apparatus of this invention.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウェーハを吸着保持して高速回転するウェーハチ
ャックと、前記ウェーハチャックに供給する半導体ウェ
ーハの姿勢制御を行なう姿勢制御部と、前記姿勢制御部
で姿勢制御されたウェーハの重心点をウェーハチャック
の回転中心軸に一致せしめるようにウェーハチャックに
移送する移送機構とを設けてなる半導体製造装置。A wafer chuck that holds a semiconductor wafer by suction and rotates at high speed; a posture control section that controls the posture of the semiconductor wafer supplied to the wafer chuck; A semiconductor manufacturing device equipped with a transfer mechanism for transferring a wafer to a chuck so that the wafer is aligned with a central axis.
JP5767084U 1984-04-18 1984-04-18 semiconductor manufacturing equipment Pending JPS60169838U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5767084U JPS60169838U (en) 1984-04-18 1984-04-18 semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5767084U JPS60169838U (en) 1984-04-18 1984-04-18 semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
JPS60169838U true JPS60169838U (en) 1985-11-11

Family

ID=30582415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5767084U Pending JPS60169838U (en) 1984-04-18 1984-04-18 semiconductor manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS60169838U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01129436A (en) * 1987-11-16 1989-05-22 Nec Corp Treater for semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01129436A (en) * 1987-11-16 1989-05-22 Nec Corp Treater for semiconductor substrate

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